Numerical investigation of characteristics and excitation effects on discharge properties in an inductively coupled plasma torch

Abstract

This paper focuses on an atmospheric-pressure inductively coupled plasma (ICP) torch sustained by an argon discharge. A two-dimensional axisymmetric model is developed for the numerical simulation of the device. Maxwell equations and fluid equations were solved as the governing equations using the COMSOL Multiphysics software. The result presents the electromagnetic fields generated by the ICP, plasma parameters (electron density and temperature), and gas characteristics (gas flow and gas temperature). The study of the effects of excitation parameters (coil current, coil geometry, and coil turns) on plasma characteristics is analyzed.