Numerical Investigation of Power Transmission Efficiency in a RF Plasma

Abstract

Capacitively coupled radio frequency discharges are used in a variety of applications in which the power transmission efficiency of the discharge is an important performance parameter. While previous research addressed the discharge properties and discharge modeling, little analysis has been done on the dependence of the power transmission efficiency on main discharge paremeters such as applied voltage, operating frequency and pressure. To investigate the effects of a dual frequency waveform on the power transmission efficiency, Particle-InCell/Monte-Carlo Collison (PIC/MCC) methods are used to simulate RF co-axial plasma discharge. Plasma characteristics are studied for a range of operating pressures and radii, as electrode voltages were varied between 0, 100 and 250V. The investigation concludes that the addition of a RF power source to the outer electrode increase power transmission efficiency by about 100%. Power transmission efficiency increases with a decrease in radius and an increase in pressure, in general. Low-frequency high-voltage power source combination is found to generate a more efficient discharge than a high-frequency high-voltage power source.