1991
DOI: 10.13182/fst91-a29697
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Numerical Investigations of Electron Beam Energy Deposition into the Gas Medium of an Excimer Laser

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“…The calculation of the passage by fast electrons through gas medium, as well as through a foil of output units of accelerators, was carried out by Monte-Carlo method [7]. At numerical research and optimization of e-beam pumping of gas lasers including exciplex lasers on halides of inert gases with life time of top laser levels of tens and more nanoseconds a stationary approach is usually applied [8].…”
Section: Numerical Research Of E-beam Pumped Excimer Vuv-sourcesmentioning
confidence: 99%
“…The calculation of the passage by fast electrons through gas medium, as well as through a foil of output units of accelerators, was carried out by Monte-Carlo method [7]. At numerical research and optimization of e-beam pumping of gas lasers including exciplex lasers on halides of inert gases with life time of top laser levels of tens and more nanoseconds a stationary approach is usually applied [8].…”
Section: Numerical Research Of E-beam Pumped Excimer Vuv-sourcesmentioning
confidence: 99%