In the present report the results of study of kinetic and electrophysical questions connected with the development of pulse-periodic sources of luminescent and coherent VUV-radiation on dimers of inert gases with e-beam pumping of active media are presented. With using of the received results technical proposals on the creation of coherent VUV-source on superlunhinescence of excimers, capable to work with average power of radiation of not less 5 W at pulse-repetition rate ofup to 10 Hz have been elaborated.