2021
DOI: 10.1016/j.solmat.2020.110785
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Numerical method for thermal donors formation simulation during silicon Czochralski growth

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Cited by 10 publications
(6 citation statements)
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“…[ 21–24 ] The discrepancy becomes smaller as g increases, consistent with the known distribution of oxygen and thermal donors in Cz‐Si ingots. [ 21 ]…”
Section: Resultssupporting
confidence: 58%
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“…[ 21–24 ] The discrepancy becomes smaller as g increases, consistent with the known distribution of oxygen and thermal donors in Cz‐Si ingots. [ 21 ]…”
Section: Resultssupporting
confidence: 58%
“…[21][22][23][24] The discrepancy becomes smaller as g increases, consistent with the known distribution of oxygen and thermal donors in Cz-Si ingots. [21] There are uncertainties associated with the solidified fractions of the wafers, particularly for the wafers from the tail end of the ingot, due to an unknown amount of silicon melt remaining in the crucible after ingot growth, as well as an unknown proportion of the discarded tail section of the ingot prior to wafering. Consequently, the g values of the tail wafers (g ≥ 0.8) were estimated based on the extrapolated Scheil's fitting to the measured N D data below g < 0.8 and the reported P segregation coefficient of 0.35 in Si.…”
Section: Dopant Concentration and Scheil Fittingsupporting
confidence: 63%
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“…[121][122][123] Additionally, unwanted oxygen in the wafer can form oxygen precipitates or thermal donors when processed at elevated temperatures. 111,124 These defects appear as circular rings and can manifest in both p-type and n-type wafers. 125 Metallic impurities, such as iron, copper, chromium and aluminium can also be incorporated into the wafer during manufacturing.…”
Section: Silicon Wafer Typementioning
confidence: 99%
“…[ 52 ] Thermal donors are recombination‐active defects thought to be formed via the aggregation of silicon and interstitial oxygen atoms. [ 53,54 ] The formation of thermal donors varies as a function of thermal history, with peak formation rates reported to occur at ≈470 °C, [ 55 ] although a wide window of temperatures can lead to the formation of these defects. The formation of thermal donors in n‐type wafers can have a significant negative impact on efficiency.…”
Section: Defect Engineering Approachesmentioning
confidence: 99%