Numerical modeling and validation of squeezed-film damping in vacuum-packaged industrial MEMS

Syed, Wajih U.; Brimmo, Ayoola T.; Waheed, Owais Talaat; Bojesomo, Alabi; Ali, Mohamed Hassan; Ocak, Ilker Ender; Sun, Cheng; Chatterjee, Aveek; Elfadel, Ibrahim M.

doi:10.1088/1361-6439/aa71cb

Cited by 10 publications

(2 citation statements)

References 38 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The mean free path of the air can be calculated as [ 32 ]:

where

is the air viscosity at atmospheric pressure,

is the mass of air,

is the air pressure,

is the air temperature and

is the Boltzman constant. The classification of flow regimes based on the

values are discussed in [ 33 ]. For the proposed MEMS gyroscope, the smaller air gap between the sensing parallel plates is 3 µm which results in a

value 0.0225 at atmospheric pressure and room temperature.…”

Section: Analytical Modeling Of the Multi-dof Mems Gyroscopementioning

confidence: 99%

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

et al. 2020

View full text Add to dashboard Cite

This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost and widely-used silicon-on-insulator multi-user MEMS processes (SOIMUMPs), with silicon as a structural material. The proposed design consists of a 3-DoF drive mode oscillator with the concept of addition of a collider mass which transmits energy from the drive mass to the passive sense mass. In the sense direction, 2-DoF sense mode oscillator is used to achieve dynamically-amplified displacement in the sense mass. A detailed analytical model for the dynamic response of MEMS gyroscope is presented and performance characteristics are validated through finite element method (FEM)-based simulations. The effect of operating air pressure and temperature variations on the air damping and resulting dynamic response is analyzed. The thermal stability of the design and corresponding effect on the mechanical and capacitive sensitivity, for an operating temperature range of −40 °C to 100 °C, is presented. The results showed that the proposed design is thermally stable, robust to environmental variations, and process tolerances with a wide operational bandwidth and high sensitivity. Moreover, a system-level model of the proposed gyroscope and its integration with the sensor electronics is presented to estimate the voltage sensitivity under the constraints of the readout electronic circuit.

show abstract

“…The mean free path of the air can be calculated as [ 32 ]:

where

is the air viscosity at atmospheric pressure,

is the mass of air,

is the air pressure,

is the air temperature and

is the Boltzman constant. The classification of flow regimes based on the

values are discussed in [ 33 ]. For the proposed MEMS gyroscope, the smaller air gap between the sensing parallel plates is 3 µm which results in a

value 0.0225 at atmospheric pressure and room temperature.…”

Section: Analytical Modeling Of the Multi-dof Mems Gyroscopementioning

confidence: 99%

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

et al. 2020

View full text Add to dashboard Cite

show abstract

“…The use of Reynolds equation provides a notable reduction of the computational time compared to the Navier-Stokes model. Also it can be used for complex microsystems like perforated accelerometers [12,13] magnetometers [14] and micromirrors [15,16].…”

Section: Introductionmentioning

confidence: 99%

Modeling and experimental characterization of squeeze film effects in nonlinear capacitive circular microplates

Jallouli

Kacem

Najar

et al. 2019

Mechanical Systems and Signal Processing

View full text Add to dashboard Cite

In this article, an original approach to model the squeeze film effects in capacitive circular microplates is developed. The nonlinear von Kármán plate theory is used while taking into consideration the electrostatic and geometric nonlinearities of the clamped edge microplate. The fluid underneath the plate is modeled using the nonlinear Reynolds equation with a corrected effective dynamic viscosity due to size effect. The strongly coupled system of equations is solved using the Differential Quadrature Method (DQM) by discretizing the structural and the fluid domains into a set of grid points. The linear effects of the squeeze film on the microplate have been investigated based on the complex eigenfrequencies of the multiphysical problem. It is shown that the air film can alter the resonance frequencies by adding stiffness as well as damping to the system. The model has been validated numerically with respect to a Finite Element Model (FEM) implemented in ANSYS and experimentally on a fabricated circular microplates. The nonlinear effects of the squeeze film have been studied by determining the steady state solution of the system using the finite difference method (FDM) coupled with the arclength continuation technique. It is shown that the decrease of the static pressure shifts the resonance frequency and leads to an increase of the vibration amplitude due to the reduction of the damping coefficient, while the increase in the pressure enlarges the bistability domain. The developed model can be exploited as an effective tool to predict the nonlinear dynamic behavior of microplates under the effect of air film for the design of Capacitive Micromachined Ultrasonic Transducers (CMUTs).

show abstract

Tapered-Beam Piezoelectric MEMS Energy Harvesters

Syed,

Elfadel

2024

Tapered Beams in MEMS

View full text Add to dashboard Cite

Numerical modeling and validation of squeezed-film damping in vacuum-packaged industrial MEMS

Cited by 10 publications

References 38 publications

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

Modeling and experimental characterization of squeeze film effects in nonlinear capacitive circular microplates

Tapered-Beam Piezoelectric MEMS Energy Harvesters

Contact Info

Product

Resources

About