In this chapter, the electric-magnetic-mechanical coupling methods and related research progress of precision machine tools are discussed. The electromagnetic machine complex of guideway and spindle and the influence of electromagnetic machine parameters on precision machining equipment are discussed respectively based on the key functional parts of precision machine tools. Then, the electromagnetic coupling, motor coupling, and magnetic machine coupling are analyzed respectively to study the coupling of three technical directions, and the method involves the finite element analysis method and electromagnetic machine test method of electromagnetic machine. Based on a specific machining process example, this chapter discusses the theoretical analysis of the influence of three parameters of electromagnetic machine on precision machining machine tools. Finally, the summary analysis of this chapter needs to study the systematic