Numerical profile correction of microwave cavity resonance spectroscopy measurements of the electron density in low-pressure discharges

Staps, T. J. A.; Platier, Bart; Mihailova, DB Diana; Meijaard, P.; Beckers, JL Jozef

doi:10.1063/5.0054851

Cited by 5 publications

(5 citation statements)

References 37 publications

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“…Our argon pressure of 8 mTorr was lower than in their experiment, leading us to extrapolate their data. As explained in (supplementary material), this extrapolation yielded 1.5 ms, as our estimate of the survival time for electrons to remain in our chamber, at the minimum detectable density of Staps et al [40]. We will use that value, 1.5 ms, as the second of our three inputs in our inference, to describe the general shape of Q(t), for various runs.…”

Section: Temporal Development Of a Dust Particle's Charge In The Afte...mentioning

confidence: 94%

“…We actually have no direct measure of Q(t), but we can at least infer a description of Q(t). We make that inference by relying on a combination of three inputs: first figure 3, second the experimental result of Staps et al [40] for the survival of electrons, and third what is known in general about the finite charging time for a dust particle. We elaborate on these three inputs, next.…”

Section: Temporal Development Of a Dust Particle's Charge In The Afte...mentioning

confidence: 99%

“…Second, regarding how long electrons survive in the chamber, we will rely on the experimental observations of Staps et al [40]. They detected electrons using microwave cavity resonance, in an afterglow.…”

Section: Temporal Development Of a Dust Particle's Charge In The Afte...mentioning

confidence: 99%

“…When the plasma power is turned off, electrons and ions do not immediately recombine, but instead gradually diminish in number, in what is called a temporal afterglow [34][35][36][37][38][39][40]. The ions and electrons are transported to the chamber walls, during the afterglow, and the timing of this transport has been a topic of renewed interest because of dust particle charging [8,[11][12][13].…”

Section: Introductionmentioning

confidence: 99%

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Controlling the charge of dust particles in a plasma afterglow by timed switching of an electrode voltage

Chaubey

Goree

2023

J. Phys. D: Appl. Phys.

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A method is demonstrated for controlling the charge of a dust particle in a plasma afterglow, allowing a wider range of outcomes than an earlier method. As in the earlier method, the dust particles are located near an electrode that has a DC voltage during the afterglow. Here, that DC voltage is switched to a positive value at a speciﬁed delay time, instead of maintaining a constant negative voltage as in the earlier method. Adjusting the timing of this switching allows one to control the residual charge gradually over a wide range that includes both negative and positive values of charge. For comparison, only positive residual charges were attained in the earlier method. We were able to adjust the residual charge from about -2000 e to +10,000 e, for our experimental parameters (8.35 mm particles, 8 mTorr argon pressure, and a DC voltage that was switched from -150 V to +125 V within the ﬁrst two milliseconds of the afterglow). The plasma conditions near the dust particles changed from ion-rich to electron-rich, when the electrode was switched from cathodic to anodic. Making this change at a speciﬁed time, as the electrons and ions decay in the afterglow, provides this control capability. These results also give insight into the time development of a dust particle’s charge in the afterglow, on a sub-millisecond time scale.

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Section: Temporal Development Of a Dust Particle's Charge In The Afte...mentioning

confidence: 94%

Section: Temporal Development Of a Dust Particle's Charge In The Afte...mentioning

confidence: 99%

Section: Temporal Development Of a Dust Particle's Charge In The Afte...mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Controlling the charge of dust particles in a plasma afterglow by timed switching of an electrode voltage

Chaubey

Goree

2023

J. Phys. D: Appl. Phys.

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“…They deeply analyzed the CP [ 29 , 30 , 31 ], developed it as a real-time monitoring instrument for electron density as well as film thickness [ 22 ]. With similar principle of the CP, Beckers et al have developed microwave cavity resonance spectroscopy (MCRS), that measures cavity resonance frequency shift by plasma in S11 spectrum [ 32 , 33 , 34 ]. In the recent attempt, they demonstrated operation of the MCRS with the wall-mounted invasive antenna.…”

Section: Introductionmentioning

confidence: 99%

Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics

Kim

Lee

You

et al. 2022

Sensors

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As the importance of measuring electron density has become more significant in the material fabrication industry, various related plasma monitoring tools have been introduced. In this paper, the development of a microwave probe, called the measurement of lateral electron density (MOLE) probe, is reported. The basic properties of the MOLE probe are analyzed via three-dimensional electromagnetic wave simulation, with simulation results showing that the probe estimates electron density by measuring the surface wave resonance frequency from the reflection microwave frequency spectrum (S11). Furthermore, an experimental demonstration on a chamber wall measuring lateral electron density is conducted by comparing the developed probe with the cutoff probe, a precise electron density measurement tool. Based on both simulation and experiment results, the MOLE probe is shown to be a useful instrument to monitor lateral electron density.

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Electron density measurements in low-pressure plasmas using cutoff probes and comparison with hairpin and Langmuir probes

Mishra,

Tuharin,

Turek

et al. 2024

Physics of Plasmas

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We present a comparative study of electron density obtained in a low-temperature plasma by the cutoff probe and compare the results with data from both the hairpin and the Langmuir probes. The measurements with different probes were conducted in a DC discharge generated by an iron hollow cathode under identical experimental conditions. This comparative analysis provides insight into the reliability and consistency of electron density measurements across different probe types in this specific experimental setup. The information acquired from the cutoff and hairpin probes enables electron density measurements within the frequency range limitations of the instruments. Measurements of electron density are performed in a mixture of argon and oxygen at a low pressure of 5 Pa, in dependence on the discharge current and Ar:O2 mixture ratio. A qualitative discussion of the obtained results is provided.

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Numerical profile correction of microwave cavity resonance spectroscopy measurements of the electron density in low-pressure discharges

Abstract: Numerical profile correction of microwave cavity resonance spectroscopy measurements of the electron density in low-pressure discharges. Review of Scientific Instruments, 92(9), [093504].

Cited by 5 publications

References 37 publications

Controlling the charge of dust particles in a plasma afterglow by timed switching of an electrode voltage

Controlling the charge of dust particles in a plasma afterglow by timed switching of an electrode voltage

Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics

Electron density measurements in low-pressure plasmas using cutoff probes and comparison with hairpin and Langmuir probes

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