Numerical simulation analysis of flexible capacitive pressure sensors based on porous pyramidal microstructures

Javidi, Reza; Moghimi Zand, Mahdi; Alizadeh Majd, Sara

doi:10.1007/s10825-023-02116-7

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2024

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Cited by 4 publications

References 45 publications

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Carbon black and boron nitride conductive fillers dispersed porous conductive polymer composite-based piezoresistive sensor for biomedical applications

Allam,

Vandrangi

2024

J Mater Sci: Mater Electron

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Carbon black and boron nitride conductive fillers dispersed porous conductive polymer composite-based piezoresistive sensor for biomedical applications

Allam,

Vandrangi

2024

J Mater Sci: Mater Electron

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Composite Graphene/Cu Pressure Sensor with One-Step Laser-Fabricated Microstructure: A One Stone Two Birds Strategy

Jin,

Shen,

Zhou

et al. 2024

2024 IEEE 3rd International Conference on Micro/Nano Sensors for AI, Healthcare, and Robotics (NSENS)

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Highly Sensitive and Flexible Capacitive Pressure Sensors Combined with Porous Structure and Hole Array Using Sacrificial Templates and Laser Ablation

Zhao,

Zhou,

Jiang

et al. 2024

Polymers

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Flexible, wearable pressure sensors offer numerous benefits, including superior sensing capabilities, a lightweight and compact design, and exceptional conformal properties, making them highly sought after in various applications including medical monitoring, human–computer interactions, and electronic skins. Because of their excellent characteristics, such as simple fabrication, low power consumption, and short response time, capacitive pressure sensors have received widespread attention. As a flexible polymer material, polydimethylsiloxane (PDMS) is widely used in the preparation of dielectric layers for capacitive pressure sensors. The Young’s modulus of the flexible polymer can be effectively decreased through the synergistic application of sacrificial template and laser ablation techniques, thereby improving the functionality of capacitive pressure sensors. In this study, a novel sensor was introduced. Its dielectric layer was developed through a series of processes, including the use of a sacrificial template method using NaCl microparticles and subsequent CO2 laser ablation. This porous PDMS dielectric layer, featuring an array of holes, was then sandwiched between two flexible electrodes to create a capacitive pressure sensor. The sensor demonstrates a sensitivity of 0.694 kPa−1 within the pressure range of 0–1 kPa and can effectively detect pressures ranging from 3 Pa to 200 kPa. The sensor demonstrates stability for up to 500 cycles, with a rapid response time of 96 ms and a recovery time of 118 ms, coupled with a low hysteresis of 6.8%. Furthermore, our testing indicates that the sensor possesses limitless potential for use in detecting human physiological activities and delivering signals.

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Numerical simulation analysis of flexible capacitive pressure sensors based on porous pyramidal microstructures

Cited by 4 publications

References 45 publications

Carbon black and boron nitride conductive fillers dispersed porous conductive polymer composite-based piezoresistive sensor for biomedical applications

Carbon black and boron nitride conductive fillers dispersed porous conductive polymer composite-based piezoresistive sensor for biomedical applications

Composite Graphene/Cu Pressure Sensor with One-Step Laser-Fabricated Microstructure: A One Stone Two Birds Strategy

Highly Sensitive and Flexible Capacitive Pressure Sensors Combined with Porous Structure and Hole Array Using Sacrificial Templates and Laser Ablation

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