This paper presents the effect of temperature and strain rate on the superplastic deformation behavior of Ti-3%Mo-1%V-4%Al, Ti-4%V-6%Al, and Ti-1.8%Mn-2.5%Al alloys, which have different initial microstructures. The microstructure, before and after superplastic deformation in the deformation regimes that provided the maximum elongation, was analyzed. The deformation regimes, corresponding to the minimum strain hardening/softening effect, provided a higher elongation to failure due to their low tendency toward dynamic grain growth. As the values of stress became steady (σs), the elongation to failure and strain-hardening coefficient were analyzed under various temperature–strain rate deformation regimes. The analysis of variance of these values was performed to determine the most influential control parameter. The results showed that the strain rate was a more significant parameter than the temperature, with respect to the σs, for the investigated alloys. The most influential parameter, with both the elongation to failure and strain-hardening coefficient, was the temperature of the Ti-3%Mo-1%V-4%Al and Ti-1.8%Mn-2.5%Al alloys and the strain rate of the Ti-4%V-6%Al alloy.