2001
DOI: 10.1088/0960-1317/12/1/311
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Numerical simulation of fluid-structure interaction in a MEMS diaphragm drop ejector

Abstract: This paper discusses the numerical simulation on the drop formation process for the design of a MEMS diaphragm drop ejector, known as MEMSJet. The fluid-structure interaction between the pressure of the fluid and the motion of the actuator diaphragm is addressed and this problem is successfully solved in a 2D axisymmetric domain through linking Flow3D with our own developed user programs. This capability is then used to simulate the jetting performance and guide the design of the MEMSJet.

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Cited by 27 publications
(15 citation statements)
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“…On the hydrodynamics side, the no-slip condition at the fluid-solid interface forces the fluid to move with the diaphragm. On the structural dynamics side, the hydrodynamic forces (the hydrodynamic pressure and the viscous shear) exerted on the diaphragm determine the transient displacement of the diaphragm [Pan et al 2002].…”
Section: Overview Of Microfluidic Theorymentioning
confidence: 99%
“…On the hydrodynamics side, the no-slip condition at the fluid-solid interface forces the fluid to move with the diaphragm. On the structural dynamics side, the hydrodynamic forces (the hydrodynamic pressure and the viscous shear) exerted on the diaphragm determine the transient displacement of the diaphragm [Pan et al 2002].…”
Section: Overview Of Microfluidic Theorymentioning
confidence: 99%
“…However, most of the previous analyses are limited to numerical simulations. Moreover, they were performed to study droplet evolution under simplified driving BCs, such as the pressure or velocity histories specified at the nozzle inlet, the rigid movingboundary problem, etc., without taking account of elastic deformation of the piezoelectric actuator and the coupling between the solid and flow field (Yeh 2001;Pan et al 2002;Wijshoff 2004). To authors' knowledge, there is lacking of PIJ study taking account of elastic deformation of the piezoelectric actuator as well as the coupling between the solid and flow field.…”
Section: Introductionmentioning
confidence: 99%
“…For example, Kamisuki et al (1998Kamisuki et al ( , 2000 described a micro-electro-mechanical diaphragm drop ejector, and experimentally characterized the droplet formation based on this design. Pan et al (2002) numerically simulated the droplet formation process from this same design using commercially available software. This device is based on a rigid nozzle, driven by a piezoelectric actuated diaphragm.…”
Section: Introductionmentioning
confidence: 99%