2011
DOI: 10.1007/s11661-011-0621-3
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Numerical Simulation of Phosphorus Removal from Silicon by Induction Vacuum Refining

Abstract: Phosphorus can be expected to evaporate preferentially from silicon melt by induction vacuum refining (IVR). In the present study, on the assumption of phosphorus evaporating from silicon melt as gas species P and P 2 , a numerical model of phosphorus removal from silicon by IVR was developed. The factors affecting phosphorus removal in decreasing order are temperature, chamber pressure, geometry of silicon melt, holding time, and original phosphorus concentration. Calculated phosphorus removal shows good agre… Show more

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Cited by 43 publications
(20 citation statements)
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References 22 publications
(26 reference statements)
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“…For the present study, the silicon melt is hold in the graphite crucible and the induction takes place also in the crucible and it may affect the calculations done by Eq. (12). The authors, however, has modeled the induction melting of silicon in the graphite crucible by Comsol multiphysics simulation software and the calculated velocities are close to the results of applying Eq.…”
Section: Mass Transfer In the Melt Boundary Layersupporting
confidence: 53%
See 3 more Smart Citations
“…For the present study, the silicon melt is hold in the graphite crucible and the induction takes place also in the crucible and it may affect the calculations done by Eq. (12). The authors, however, has modeled the induction melting of silicon in the graphite crucible by Comsol multiphysics simulation software and the calculated velocities are close to the results of applying Eq.…”
Section: Mass Transfer In the Melt Boundary Layersupporting
confidence: 53%
“…Zheng et al [12] have recently developed a numerical approach for calculating this parameter, where the mass transfer coefficient of phosphorus in the gas phase is calculated considering the diffusivities of both Si and P in the gas phase. In the present study, however, the mass transfer resistance in the gas phase (1=k g / is simply calculated by subtracting the determined mass transfer resistances 1=k m and 1=k c from the total mass transfer resistance 1=k P as seen in Table 2.…”
Section: Mass Transfer In the Gas Phasementioning
confidence: 99%
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“…A more cost-effective and energy-efficient alternative to produce SOG-Si is to use a metallurgical process, which provides sustainability and a number of benefits in terms of productivity and process cost. Metallurgical methods such as directional solidification [1][2][3], alloy refining [4][5][6], oxidation with plasma melting [7,8], and vacuum melting [9,10] have all been investigated; however, each has its own unique limitations that prevent the total removal of impurities. This is largely a result of the fact that the segregation coefficients of B and P are both close to 1 in molten Si, meaning that they are not easily removed from the melt.…”
Section: Introductionmentioning
confidence: 99%