1998
DOI: 10.1016/s0082-0784(98)80095-7
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Numerical study of low- and high-temperature silane combustion

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Cited by 31 publications
(33 citation statements)
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“…It is also important for silane oxidation by nitrous oxide [2,3] because the thermal decomposition of silane is faster than that of nitrous oxide and results in the release of molecular hydrogen [4]. Silane-nitrous oxide mixtures are widely used in the semi-conductor industry [5] in order to form insulator or protective layers [6,7,8,9] in a wide variety of applications [10,11,12]. These mixtures have been involved in some accidental combustion events [13].…”
Section: Introductionmentioning
confidence: 99%
“…It is also important for silane oxidation by nitrous oxide [2,3] because the thermal decomposition of silane is faster than that of nitrous oxide and results in the release of molecular hydrogen [4]. Silane-nitrous oxide mixtures are widely used in the semi-conductor industry [5] in order to form insulator or protective layers [6,7,8,9] in a wide variety of applications [10,11,12]. These mixtures have been involved in some accidental combustion events [13].…”
Section: Introductionmentioning
confidence: 99%
“…Babushok, Tsang, Burgess, andZachariah (1998), Britten, Tong, andWestbrook (1990), Donovan et al (2005), Hartman, Famil-Ghiriha, Ring, andO'Neal (1987) and Kondo, Tokuhashi, Takahashi, and Kaise (2000). Nevertheless, these studies focus more on finding the chemical mechanism of silane combustion that leads to autoignition.…”
Section: Introductionmentioning
confidence: 99%
“…Analogous rates were taken from the Takahashi list 5 or the Zachariah mechanism. 42 When estimating chlorine rates from analogous hydrogen rates, rates were estimated as roughly 10 times slower for abstraction, dissociation, and transfer reactions, and roughly the same for decomposition and reactions, which required more indirect analogies. These estimates are based on the few reactions where experimental rate determinations have been made for both the silane rate and the analogous silicon chloride rate.…”
mentioning
confidence: 99%