Numerical study of the discharge properties of atmospheric dielectric barrier discharge by using 200 kHz/13.56 MHz excitations

Abstract

In this work involving an atmospheric dielectric barrier discharge system, the feasibility of independence control of key plasma parameters through strategic modulation of applied dual-frequency excitation sources is demonstrated. In this paper, a one-dimensional fluid model with semi-kinetic method has been used to investigate the discharge properties of atmospheric dielectric barrier discharge by using 200 kHz/13.56 MHz excitations. Bearing good consistency and coherence with experimental results, the electrical characteristics and typical electron dynamics are studied numerically. It is revealed that the application of the high frequency excitation can restrain the increment of the low frequency current component and is effective in preventing the discharge from transitioning to a filamentary mode. This method then suggests and enables possible approaches to obtain discharges with good stability in described DBD systems.

Atmospheric pressure dual RF–LF frequency discharge: transition from α to α – γ -mode

“…The efficient transport of the ions towards the cathode induces a high secondary electron emission increasing the metastable production and the ionization in the sheath. This was for example observed by applying a 50 kHz voltage to a 5 MHz DBD in Ar/NH3 mixture [20] or 200 kHz on 13.56 MHz [17]. In [20], for an LF voltage amplitude lower than some threshold, the increased ion loss to the cathode is not compensated by increased ionization and the plasma density thus decreases.…”

“…In the γ-mode, the atmospheric pressure discharge tends to localize and a DBD configuration is helpful to achieve a diffuse discharge [15], [16]. At atmospheric pressure, the transition from α-mode to γ-mode is observed in RF discharges [17]- [19] as well as in dual RF-LF discharges [20]. According to the literature, there are two distinct ways to reach the transition: either increase the electric field into the sheath by increasing the voltage amplitude [17] or increase the secondary electron emission by applying a low frequency voltage able to transport the ions to the cathode [20].…”

“…The main advantage is an easy upscal-discharges [20]. According to the literature, there are two distinct ways to reach the transition: either increase the electric field into the sheath by increasing the voltage amplitude [17] or increase the secondary electron emission by applying a LF voltage able to transport the ions to the cathode [20]. Bischoff et al [18] studied the modification of the electron power absorption dynamics induced by changing the driving voltage amplitude and the N 2 concentration in atmospheric pressure plasma jets operated at 13.56 MHz in He/N 2 Penning mixture.…”

Atmospheric pressure dual RF-LF frequency discharge: influence of LF voltage amplitude on the RF discharge behavior

“…Most studies were focused on the use of high frequencies (HF) in the MHz range, for both excitation frequencies. However, some works combine kHz and MHz [26][27][28] frequencies. In [29,30], Liu et al superimpose an RF voltage onto an LF-DBD to modulate the electric field, which improves the uniformity of the discharge and increases the input power.…”

Influence of the RF voltage amplitude on the space- and time-resolved properties of RF–LF dielectric barrier discharges in α–γ mode

“…Since the 1990's, low-pressure dual-frequency plasmas have been developed. First studied for precursor dissociation rate control in deposition and etching processes, the association of a radio frequency (RF) and a microwave voltage [1][2][3][4][5][6], or two (and dissipated) by the plasma electrons, while maintaining a homogeneous discharge mode [30,[34][35][36][37][38]. Hence, the number densities of charged and reactive species significantly increase [40].…”