Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor deposition

Fujita, Jun–ichi; Ishida, Masahiko; Sakamoto, Toshitsugu; Ochiai, Yukinori; Kaito, Takashi; Matsui, Shinji

doi:10.1116/1.1417545

Cited by 108 publications

(88 citation statements)

References 6 publications

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“…We have previously reported that amorphous carbon pillars grown by focused ion beam induced chemical vapor deposition (FIB-CVD) technique [17,18], containing a certain amount of Ga that comes from as the ion species, were turned into multi-walled graphite tubes when a biasing voltage was instantly applied [19]. Here, the distinctive feature of the transformed pillar was gallium droplets coexistence with the graphite partition inside the graphitized tube, and the outside of the tube still remained as an amorphous carbon.…”

mentioning

confidence: 99%

Graphitization at interface between amorphous carbon and liquid gallium for fabricating large area graphene sheets

Fujita

Ueki

Miyazawa

et al. 2009

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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We have found that liquid gallium exhibits as a good graphitizing catalyst for a large area graphene sheet. While gallium and carbon are known to be an insoluble system, however, we have found that the catalytic reaction occurs at a very narrow interfacial region between amorphous carbon and liquid gallium. Amorphous carbon film was transformed into graphite layer composed of a few layers of graphene sheet. These thin graphene film can be easily transferred into silicon substrate through the intermediation of PDMS rubber stamping.

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mentioning

confidence: 99%

Graphitization at interface between amorphous carbon and liquid gallium for fabricating large area graphene sheets

Fujita

Ueki

Miyazawa

et al. 2009

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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“…A slight shift in beam position causes shifts in secondary electrons and its distribution, so the growth moves from its place and starts from the side of the fabricated structure. The combination of this lateral growth mode with shifting beam scanning provides the growth of 3-D structures [ 45 ]. At the same time with the continuous rotation in the lateral growth it is possible to achieve a rotational symmetry like a wineglass or a boll.…”

Section: Fabrication Of 3-d and Complex Micro-and Nanostructuresmentioning

confidence: 99%

Focused Ion Beam (FIB) Technology for Micro- and Nanoscale Fabrications

Kant

Lošić

2013

Lecture Notes in Nanoscale Science and Technology

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The focused ion beam (FIB) technology has become increasingly popular fabrication and characterization tool across many research areas from nanotechnology, material science, microelectronic industry, life science, biology, and medicine. FIB was specially recognized as an attractive tool or the fabrication of micro-and nanostructures with complex geometries and shapes. This chapter presents the basic introduction of FIB dual-beam system and its operation modes, followed by description of instrument in more details. The review has emphasis on FIB fabrication of nanostructures by milling and deposition methods with particular focus on fabrication of nanopatterns and nanopore arrays. Various efforts to fabricate micro-and nanoscale structure and geometrically complex structure are described. Finally, recent developments of applications of FIB in different areas of material science and life science are briefl y reviewed.

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“…The key issue in making such 3D work is the shallow penetration depth of ions (a few tens of nanometers), which reduces the dispersion area of secondary electrons, and thus the deposition area is tightly limited to within about several tens of nanometers. We also reported that diamond-like-carbon (DLC) pillars grown by FIB-CVD with a precursor of phenanthrene vapor have a very large Young's modulus that exceeds 600 GPa, which provides outstanding characteristics for various applications [2]. electron-beam chemicalvapor-deposition (EB-CVD) is also well known for its ability to produce nanostructures, which has been demonstrated to fabricate 3D nanostructures with feature sizes down to a few tens of nanometers [3].…”

Section: Introductionmentioning

confidence: 97%