1973
DOI: 10.1002/pssa.2210160239
|View full text |Cite
|
Sign up to set email alerts
|

Observation of p–n junction in transmission electron microscopy by out-of-focus technique

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
6
0

Year Published

1973
1973
2021
2021

Publication Types

Select...
5
1

Relationship

2
4

Authors

Journals

citations
Cited by 11 publications
(6 citation statements)
references
References 2 publications
0
6
0
Order By: Relevance
“…The GaAs sample was characterized by electron holography and Lorenz TEM techniques prior to DPC STEM imaging. By comparing with these existing methods 18 19 , the capabilities and benefits of the present imaging method are independently verified. The sample thickness is estimated to be about 290 nm from convergent beam electron diffraction analysis.…”
Section: Methodsmentioning
confidence: 90%
“…The GaAs sample was characterized by electron holography and Lorenz TEM techniques prior to DPC STEM imaging. By comparing with these existing methods 18 19 , the capabilities and benefits of the present imaging method are independently verified. The sample thickness is estimated to be about 290 nm from convergent beam electron diffraction analysis.…”
Section: Methodsmentioning
confidence: 90%
“…Therefore, by carefully positioning an aperture over the distorted spot, an image sensitive to the electric field can be obtained. Shortly after, Merli et al reported the imaging of Si p–n junctions using the “Fresnel” or “out-of-focus” method. As suggested by its name, this method makes use of a defocused electron beam and can be used in both conventional and scanning modes. , However, defocused TEM imaging suffers from interpretability and spatial resolution issues.…”
mentioning
confidence: 99%
“…It is assumed that the internal field profile of the junction is the same both i n the thick and thinned specimens, that is, thickness and surface effects are considered to be negligible. Assuming that the model is of the one-sided step junction type [14] the electric field E within the depletion layer region is given by 5.7 x 10-5 6.0 x 10-5 8.9 x 10-5 1.0 x 10-4 6.8 X where W is the depletion layer width and X the distance of the point considered from the maximum of the field. The field is zero outside the depletion layer region.…”
Section: Deflection By the Internal Fieldmentioning
confidence: 99%