We have measured the ion-channeling minimum yield ( min ) and angular width (⌿ 1/2 ) for Y, Ba, Cu, and O in 2000 Å ͑001͒-oriented films of YBa 2 Cu 3 O 7Ϫ␦ on MgO. The measurements mapped out a 30 K region around the critical temperature (T c ) in 1-2 K steps, and T c was determined in situ. A 16 O͑␣,␣͒ 16 O resonance was used to study the O motions. min increases and ⌿ 1/2 decreases with increasing temperature for all elements, as expected for a smooth increase in vibration amplitude. We see no anomalous jumps in either parameter, which differs from previous reports on YBa 2 Cu 3 O 7Ϫ␦ bulk single crystals.