2016
DOI: 10.1038/micronano.2015.43
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Off-stoichiometry improves the photostructuring of thiol–enes through diffusion-induced monomer depletion

Abstract: Thiol–enes are a group of alternating copolymers with highly ordered networks and are used in a wide range of applications. Here, “click” chemistry photostructuring in off-stoichiometric thiol–enes is shown to induce microscale polymeric compositional gradients due to species diffusion between non-illuminated and illuminated regions, creating two narrow zones with distinct compositions on either side of the photomask feature boundary: a densely cross-linked zone in the illuminated region and a zone with an unp… Show more

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Cited by 15 publications
(16 citation statements)
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“…As polymer matrix, thiol‐ene monomers were used, since they form a densely cross‐linked network and because they exhibit interesting features for lab‐on‐chip applications, such as tunable mechanical properties, easy covalent surface bonding and surface grafting, and excellent photolithographic capabilities …”
Section: Methodsmentioning
confidence: 99%
“…As polymer matrix, thiol‐ene monomers were used, since they form a densely cross‐linked network and because they exhibit interesting features for lab‐on‐chip applications, such as tunable mechanical properties, easy covalent surface bonding and surface grafting, and excellent photolithographic capabilities …”
Section: Methodsmentioning
confidence: 99%
“…113 Photostructuring of off-stoichiometric thiol−ene prepolymer 114 mixture depletes the deficient monomer in the nonexposed 115 region immediately adjacent to the exposed prepolymer, which 116 suppresses gelation caused by radical diffusion in that region. 18 We hypothesize that a similar effect occurs during e-beam 118 exposure. The addition of inhibitor compound further prohibits the broadening of features by scavenging radicals in 120 nonexposed areas.…”
mentioning
confidence: 89%
“…Thiol-ene coupling reaction has a significant potential for the development of complex micro/nano polymer-based patterns and structures, which have been explored by various patterning techniques including classic photolithography, electron beam lithography, reaction injection molding and soft lithography [135][136][137][138].…”
Section: Application Of Thiol-ene Coupling Reaction In Patterningmentioning
confidence: 99%
“…Figure 3.2 compares the patterning results using these two types of photoresists in a photolithographic process. The step-growth mechanism in the thiol-ene coupling chemistry and the associated delayed gelation, rapid reaction kinetics, uniform polymer network, negligible oxygen inhibition, and low shrinkage stress, make this thiol-ene reaction suitable to develop negative-toned photoresist materials in the photolithographic patterning process [138][139][140]. The delayed gelation and low shrinkage stress lead to sharp photolithographic profiles, which possess a well-defined and distinct boundary between exposed and unexposed photoresist regions.…”
Section: Photolithographymentioning
confidence: 99%