2008
DOI: 10.1007/s00339-008-4848-9
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Ohmic contact formation to bulk and heterostructure gallium nitride family semiconductors

Abstract: We describe experiments investigating the quality of ohmic contacts to both bulk GaN and to III-nitride heterostructures. Titanium-based contacts were investigated to assess the role of intermixing and surface impurities for contact formation to n-type GaN. Direct contact to the two-dimensional electron gas in GaN/AlGaN heterostructures was also studied. These contacts were made by photochemical etching of the samples to expose the heterointerface. It was observed that even in the latter case contact annealing… Show more

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Cited by 3 publications
(2 citation statements)
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“…Contacts to n-type GaN are now mostly formed by a Ti-containing metallization scheme, such as Ti/Ni/Au. 15 Here, Ti diffuses into GaN on annealing at temperatures around 900 °C, decomposing GaN, and forming titanium nitride (TiN). This leaves nitrogen vacancies behind that act as electron donors i.e., n-type dopants, making low-contact resistance n-type contacts possible.…”
Section: The Blue Ledmentioning
confidence: 99%
“…Contacts to n-type GaN are now mostly formed by a Ti-containing metallization scheme, such as Ti/Ni/Au. 15 Here, Ti diffuses into GaN on annealing at temperatures around 900 °C, decomposing GaN, and forming titanium nitride (TiN). This leaves nitrogen vacancies behind that act as electron donors i.e., n-type dopants, making low-contact resistance n-type contacts possible.…”
Section: The Blue Ledmentioning
confidence: 99%
“…It is a well-known fact that the research of Ohmic contacts is a fundamental topic for semiconductors, and Ohmic contact is very important for semiconductor detector [9][10][11][12][13], because it affects the quantum efficiency and response time, and generally, the Ohmic contact resistance is the-smaller-the-better. Generally, the work temperature of the extended wavelength InGaAs detector is about 160-300 K. Therefore, on the one side, research on the temperature dependence of Ohmic contacts will be very meaningful to improve the performance of the In 0.83 Ga 0.…”
Section: Introductionmentioning
confidence: 99%