Oligomers of MORE: Molecular Organometallic Resists for EUV

Hasan, Shaheen; Murphy, Michael; Weires, Maximilian; Grzeskowiak, Steven; Denbeaux, Greg; Brainard, Robert L.

doi:10.1117/12.2516010

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Growth Of Importance Of Semiconductor Materials1

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2023

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“…[61] The development of an efficient EUV MOR will solve the problems that organic EUV PR (Photoresist) faces, such as low absorption efficiency or low dry etch tolerance etc. [61][62][63][64][65][66][67][68][69][70][71][72][73][74][75] Also, the unit size of organic EUV PR is approximately 5 nm; however, by using MOR materials, the unit size can be narrowed down to approximately 1 nm, which is expected to enhance the resolution of the lithography process.…”

Section: Growth Of Importance Of Semiconductor Materialsmentioning

confidence: 99%

Creating the Future with Silicon

Jung

2023

Adv Materials Technologies

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The rise of AI technology, the expansion of smart and connected devices, and the COVID‐19 global pandemic have driven a change in the nature of social interactions from face‐to‐face to contact‐free/remote, which has tremendously increased the demand for various semiconductor devices. However, scaling and performance improvement of semiconductor devices are becoming more difficult every year, and extensive studies have been conducted to overcome these technological roadblocks. This paper reviews the present state of semiconductor development and discusses several approaches to overcome these scaling and performance limitations. Additionally, the importance of collaboration and the related ecosystem is emphasized to strengthen the cooperation among semiconductor stakeholders and support further semiconductor development.

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Section: Growth Of Importance Of Semiconductor Materialsmentioning

confidence: 99%

Creating the Future with Silicon

Jung

2023

Adv Materials Technologies

View full text Add to dashboard Cite

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Oligomers of MORE: Molecular Organometallic Resists for EUV

Cited by 1 publication

References 6 publications

Creating the Future with Silicon

Creating the Future with Silicon

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