On-axis self-calibration of precision XY&amp;#x03B8;&lt;inf&gt;z&lt;/inf&gt; metrology systems: An approach framework

Zhu, Yu; Hu, Chuxiong; Hu, Jinchun; Zhang, Ming; Xu, Dianna

doi:10.1109/aim.2013.6584237

2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics 2013

DOI: 10.1109/aim.2013.6584237

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On-axis self-calibration of precision XYθ<inf>z</inf> metrology systems: An approach framework

Yu Zhu

Chuxiong Hu

Jinchun Hu

et al.

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On-axis self-calibration of precision XYθ<inf>z</inf> metrology systems: An approach framework

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