On‐Chip Microsupercapacitors: From Material to Fabrication

Abstract

Microsupercapacitors (MSCs) are integrated into microdevices or chip‐based systems to store energy and power the chip efficiently, as they present excellent performance capabilities including high power density, fast charge/discharge rate, and long cycle time. Providing sufficient surface area and high electric conductivity are effective ways to enhance ion diffusion and charge transportation in electrodes, which in turn leads to high performance behavior. Herein, the novel progress of on‐chip MSCs in the past few years ranging from active materials synthesis to high‐resolution fabrication techniques is summarized, and the strategies to enhance the performance of MSCs are focused upon. From conventional materials to nanocomposite hybrid structures, the main active materials for MSC electrodes and the related fabrication techniques are reviewed in detail according to their different electrochemical performance. It is concluded that hierarchical porous‐structured materials and high‐resolution fabrication processes are of great importance in constructing high‐performance devices, which also demonstrates the future developing direction of on‐chip energy devices. The new developments of fabrication technologies such as microfabrication, laser direct writing, and inkjet printing are also discussed to show their advantages in forming high‐performance electrodes.

Boosting the Electrochemical Performance of Graphene-Based On-Chip Micro-Supercapacitors by Regulating the Functional Groups

“…The ongoing surge of miniaturization of electronic components and on-chip electronics have opened up new doors for the portable and wireless sensor networks in a variety of applications, such as health surveillance, environmental monitoring, Internet of Things, etc. − All of the demand inspires the relentless pursuit of microscale monolithic power sources, which will play vital roles in the reliable and versatile functions of these microsetups. Among the numerous rechargeable energy storage systems, micro-supercapacitors (MSCs) with in-plane interdigitated configuration have received intense attention as one of the most promising candidates because of their device-customized integration, efficient space utilization, and reliable energy charge/discharge performance. − …”

Interfacial engineering of nanostructured photoanode in fiber dye‐sensitized solar cells for self‐charging power systems

“…Planar MSCs with interdigital finger electrodes and facile packaging were designed as the energy storage component that have potential in modern microelectronic devices. [17][18][19][20][21][22][23] Inexpensive MSCs are expected to replace micro-batteries that are currently the major power source for miniature electronic devices, considering that they suffer from sluggish charge/discharge rate and unsatisfactory cycle life. [24][25][26][27][28] In our work, the MSCs were simply fabricated using laser induced graphene (LIG), without the need of conventional and complicated lithography technique to make patterned electrodes.…”

“…This integrated self‐powered system can be used to continuously drive wearable electronics. Planar MSCs with interdigital finger electrodes and facile packaging were designed as the energy storage component that have potential in modern microelectronic devices 17–23 . Inexpensive MSCs are expected to replace micro‐batteries that are currently the major power source for miniature electronic devices, considering that they suffer from sluggish charge/discharge rate and unsatisfactory cycle life 24–28 .…”

A Novel 2D Conjugated Coordination Framework with a Narrow Bandgap for Micro‐Supercapacitors

“…have been widely applied in MSCs. [ 13 ] For example, PANI nanofibers were in situ grown on metal layers and formed 2D planar and 3D cavity arrays, which exhibit high capacitance in MSCs. [ 14 ] Although conductive polymers have achieved good progress in microcapacitors, the performance and chemical stability of conductive polymer‐based MSCs are still challenging.…”