On-chip silicon Mach–Zehnder interferometer sensor for ultrasound detection

Ouyang, Boling; Li, Yanlu; Kruidhof, Marten; Horsten, Roland; Dongen, Koen W. A. van; Caro, J.

doi:10.1364/ol.44.001928

Cited by 26 publications

(9 citation statements)

References 11 publications

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“…We report preliminary ultrasound imaging experiments performed with this MZI sensor. These constitute an extension of our previous work on the MZI sensor 13 , directed to applications.…”

Section: Introductionmentioning

confidence: 67%

Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor

Ouyang

Kruidhof

et al. 2020

Integrated Optics: Devices, Materials, and Technologies XXIV

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We report a highly sensitive ultrasound sensor based on an integrated photonics silicon Mach-Zehnder interferometer (MZI). One arm of the MZI is located on a thin membrane, acting as the sensing part of the device. Ultrasound waves excite the membrane's vibrational mode, thus inducing modulation of the MZI transmission. The measured sensor transfer function is centered at 0.47 MHz and has a −6 dB bandwidth of 21.2%. For 1.0 mW optical input power, we obtain a high sensitivity of 0.62 mV/Pa, a low detection limit of 0.38 mPa/Hz 1/2 at the resonance frequency and a large dynamic range of 59 dB. In preliminary ultrasound imaging experiments using this sensor, an image of a wire phantom is obtained. The properties of this sensor and the generated image show that this sensor is very promising for ultrasound imaging applications.

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“…We report preliminary ultrasound imaging experiments performed with this MZI sensor. These constitute an extension of our previous work on the MZI sensor 13 , directed to applications.…”

Section: Introductionmentioning

confidence: 67%

Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor

Ouyang

Kruidhof

et al. 2020

Integrated Optics: Devices, Materials, and Technologies XXIV

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“…In conclusion, we have investigated weak-force sensing in a squeezed cavity and theoretically showed that (i) the SQL cannot be surpassed in the case of G = 0 or θ = 0, (ii) the measurement precision of weak-force detection can be remarkably improved at the coupling strength smaller than g SQL by tuning the parametric phase and gain, and (iii) under the approximation of κ ω, quantum noise can be reduced without losing mechanical-mode information. Our work provides new insight in strengthening the sensitivity of a force sensor with the assistance of intracavity squeezing, which can be also extended into other systems of quantum sensing with e.g., waveguide [84,87], interferometer [88], or parity-time (PT ) symmetric microcavity [89][90][91]. In the future, we plan to extend our work to study the weakforce measurement with the help of two-mode squeezing or quantum entanglement [92][93][94], squeezed mechanical modes [70,95], or squeezed sources in hybrid COM devices [96,97].…”

Section: Discussionmentioning

confidence: 93%

Weak-force sensing with squeezed optomechanics

Zhao

Zhang

Miranowicz

et al. 2019

Sci. China Phys. Mech. Astron.

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We investigate quantum-squeezing-enhanced weak-force sensing via a nonlinear optomechanical resonator containing a movable mechanical mirror and an optical parametric amplifier (OPA). Herein, we determined that tuning the OPA parameters can considerably suppress quantum noise and substantially enhance force sensitivity, enabling the device to extensively surpass the standard quantum limit. This indicates that under realistic experimental conditions, we can achieve ultrahighprecision quantum force sensing by harnessing nonlinear optomechanical devices. * These authors contributed equally to this work. †

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“…The realized waveguide width of the RR is 400 nm. Operational ultrasound sensors result from post-processing in the Kavli Nanolab Delft and subsequent packaging, using the same procedures as described in [7]. The truncated pyramidal hole under the membrane [ Fig.…”

Section: Ring-resonator Ultrasound Sensormentioning

confidence: 99%

“…Integrated photonics sensors are contributing to many fields, including chemical sensing [1][2][3][4], temperature sensing [5,6], and ultrasound detection [7,8]. Recently, such sensors for detecting ultrasound based on ring resonators (RRs) fabricated in silicon-on-insulator (SOI) and polymer platforms have attracted attention [9][10][11], in view of their high sensitivity, small footprint, possibility of realizing a sensor array on chip, immunity to electromagnetic interference and mass producibility.…”

Section: Introductionmentioning

confidence: 99%

Integrated photonics interferometric interrogator for a ring-resonator ultrasound sensor

Ouyang¹,

Haverdings²,

Horsten³

et al. 2019

Opt. Express

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We present a compact integrated photonics interrogator for a ring-resonator (RR) ultrasound sensor, the so-called MediGator. The MediGator consists of a special light source and an InP Mach-Zehnder interferometer (MZI) with a 3 × 3 multi-mode interferometer. Miniaturization of the MZI to chip size enables high temperature stability and negligible signal drift. The light source has a −3 dB bandwidth of 1.5 nm, a power density of 9 dBm/nm and a tuning range of 5.7 nm, providing sufficient signal level and robust alignment for the RR sensor. The mathematical procedure of interrogation is presented, leading to the optimum MZI design. We measure the frequency response of the sensor using the MediGator, giving a resonance frequency of 0.995 MHz. Further, high interrogation performance is demonstrated at the RR resonance frequency for an ultrasound pressure range of 1.47 − 442.4 Pa, which yields very good linearity between the pressure and the resulting modulation amplitude of the RR resonance wavelength. The measured signal time traces match well with calculated results. Linear fitting of the pressure data gives a sensor sensitivity of 77.2 fm/Pa. The MediGator provides a low detection limit, temperature robustness and a large measurement range for interrogating the RR ultrasound sensor. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI.

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On-chip silicon Mach–Zehnder interferometer sensor for ultrasound detection

Cited by 26 publications

References 11 publications

Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor

Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor

Weak-force sensing with squeezed optomechanics

Integrated photonics interferometric interrogator for a ring-resonator ultrasound sensor

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