“…It should be noted that in the framework of the considered approach, one is required to optimize annealing of dopant and/or radiation defects. To do the optimization, the recently introduced criterion [24][25][26][27][28][29][30][31][32] was used. The optimization was based on approximation of the real distributions (see Figure 4, curves 2-4, an increase in the number of curves corresponds to an increase in annealing time) by step-wise function ψ (x,y,z) (see Figure 4, curve 1).…”