On Line Measurement of Carbon Nanotube Growth Rate Based on Soft Sensor Technology

Abstract

The on line measurement of carbon nanotube growth rate during chemical vapor deposition (CVD) process has been successfully realized through conventional instruments in this article. A micro fluidized bed (MFB) reactor has been constructed with simple hardware components in order to obtain a chemical kinetic model by using soft sensor technology. The experimental results have been found to agree well with the theoretical predictions obtained from the proposed soft sensor model, hence a useful approach to the real-time measurement in CVD process has been provided.