On-Machine Profile Measuring System for Grinding Surface of Aspheric Lens

Abstract

In this paper, an on-machine profile measuring system for aspheric ground surface was presented, which involved data processing with improved two-dimensional weighted mean filtering and free form surface fitting. To verify the reliability of this system, a calibration experiment was done by comparing the measuring results of Ф320mm mirror between the WYKO 24 inch interferometer and the on-machine measuring system. The experiment results show that the on-machine measurement is effective and it can provide foundation for compensation machining. By comparing the measurement experiment results of the Keyence LC2430 with the WYKO interferometer, it is demonstrated that the deviation of PV is better than 0.23μm and the deviation of RMS better than 0.08μm.