On-Machine Self-calibration of a Two-Dimensional Stage Using an Absolute X–Y–Θ Position Sensor

Kim, Jong-Ahn; Kim, Jae Wan; Kang, Chu-Shik; Lee, Jae Yong

doi:10.1007/s12541-020-00365-1

Cited by 7 publications

(3 citation statements)

References 10 publications

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“…An additional limitation is that they provide the position in a referential external to the microscope, while the camera is the relevant referential. Another family of position sensing technique is based on imaging a scale with engineered patterns and retrieving the position and orientation from the image [17][18][19][20][21][22] . It has been used to perform in-plane position determination in various contexts, including robotics 17 , machine vision 23 , and microscopy 13,24 .…”

Section: Introductionmentioning

confidence: 99%

Identifying and fixing in-plane positioning and stability issues on a microscope using nanoGPS OxyO scales

Acher,

de Abreu,

Grigoriev

et al. 2023

Preprint

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Investigations of the in-plane positioning capabilities of microscopes using commercially available nanoGPS OxyO scales are presented. The scales have patterns that contain absolute position information, and nanoGPS software accurately determines the in-plane position from the scale images captured by the microscope camera. This makes in-plane positioning experiments simple and fast. We investigated different microscopy systems and found that positioning performance is a system issue that is not determined solely by the stage performance. In some cases, our experiments revealed software or hardware glitches that limited the positioning performance, which we easily fixed. We have also shown that it is possible to investigate vibrations using this approach and quantify their impact on image blurring. This is, for example, useful for experimentally determining the settling time after a stage movement.

show abstract

Section: Introductionmentioning

confidence: 99%

Identifying and fixing in-plane positioning and stability issues on a microscope using nanoGPS OxyO scales

Acher,

de Abreu,

Grigoriev

et al. 2023

Preprint

View full text Add to dashboard Cite

show abstract

“…For to resolve problems concerning calibration in electron-beam lithography. The main approaches are the Fourier transform [9,10], rigid motion estimation [11,12], least squares method [13][14][15][16], and optimisation [17,18]. By measuring the coordinates of each point when a grid plate is in different positions on a stage and substituting them into a 2D self-calibration model, the system errors of the stage can be separated from the measurements.…”

Section: Introductionmentioning

confidence: 99%

Uncertainty analysis of two-dimensional self-calibration with hybrid position using the GUM and MCM methods

Qiao¹,

Fan²,

Chen³

et al. 2021

Meas. Sci. Technol.

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Two-dimensional (2D) self-calibration is more suitable for ultra-precision engineering than conventional calibration, as it does not require higher-precision device calibration. A grid plate is translated or rotated in various positions on a stage, and the translation and rotation can be combined into a hybrid position. Using 2D self-calibration, the stage and plate errors are separated from the overall measurement errors obtained by measuring the grid plate on the stage. During this process, random noise propagates to the separated stage errors through the self-calibration model, causing propagation of the uncertainty of the errors. Accordingly, in this study, least squares-based 2D self-calibration was investigated. An overdetermined linear equation system was established based on the relationships among the variables for self-calibration. The Guide to the Expression of Uncertainty in Measurement was used to calculate the uncertainty propagation ratio after obtaining the least squares solutions for the self-calibration model, and the uncertainty was further analyzed using the Monte Carlo method. The uncertainty propagation ratios were less than 1, indicating that the self-calibration model had a favourable noise-suppression ability. The robustness of this self-calibration approach was mathematically determined. The effects of various position schemes (with and without a hybrid position) on the uncertainty propagation ratio were examined to support the design optimisation of the self-calibration program. The experiments revealed that the use of hybrid position schemes was advantageous over not using such schemes, although the self-calibration performance was comparable under both types of schemes.

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“…An additional limitation is that they provide the position in a referential external to the microscope, while the camera is the relevant referential. Another family of position-sensing techniques is based on computer microvision 20 of machine-readable patterned position scales [21][22][23][24][25][26][27][28][29][30] . In this approach, a micropatterned scale contains encoded position information, and its images are decoded by appropriate software into in-plane positions and orientations.…”

mentioning

confidence: 99%

Identifying and fixing in-plane positioning and stability issues on a microscope using machine-readable patterned position scales

Acher,

de Abreu,

Grigoriev

et al. 2023

Sci Rep

View full text Add to dashboard Cite

Investigations of the in-plane positioning capabilities of microscopes using machine-readable encoded patterned scales are presented. The scales have patterns that contain absolute position information, and adequate software accurately determines the in-plane position from the scale images captured by the microscope camera. This makes in-plane positioning experiments simple and fast. The scales and software used in this study are commercially available. We investigated different microscopy systems and found that positioning performance is a system issue that is not determined solely by stage performance. In some cases, our experiments revealed software or hardware glitches that limited the positioning performance, which we easily fixed. We have also shown that it is possible to investigate vibrations using this approach and quantify their impact on image blurring. This is, for example, useful for experimentally determining the settling time after a stage movement.

show abstract

On-Machine Self-calibration of a Two-Dimensional Stage Using an Absolute X–Y–Θ Position Sensor

Cited by 7 publications

References 10 publications

Identifying and fixing in-plane positioning and stability issues on a microscope using nanoGPS OxyO scales

Identifying and fixing in-plane positioning and stability issues on a microscope using nanoGPS OxyO scales

Uncertainty analysis of two-dimensional self-calibration with hybrid position using the GUM and MCM methods

Identifying and fixing in-plane positioning and stability issues on a microscope using machine-readable patterned position scales

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