On ordering of fundamental wineglass modes in toroidal ring gyroscope

Efimovskaya, Alexandra; Wang, Danmeng; Lin, Yuqing; Shkel, Andrei M.

doi:10.1109/icsens.2016.7808401

Cited by 10 publications

(4 citation statements)

References 6 publications

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“…At the same time, the quality factor of the structure is increased. In recent years, hemispherical gyroscopes with high precision and high Q value have been prepared by fused quartz [57,58]. In 2021, the research team at the National University of Defense Technology introduced a micro hemispherical resonator with teeth-like tines along the edge.…”

Section: Methodsmentioning

confidence: 99%

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

Zhang

Chen

et al. 2022

Micromachines

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The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to extend the service life and significantly improve accuracy. The highest accuracy is achieved when the ideal mode-matching state is realized. Due to the processing limitation, this index cannot be achieved, and we can only explore ways to approach this index continuously. This paper’s results of error suppression for the symmetric MEMS gyroscope are initially classified into three categories. The first category mainly introduces the processing structure and working mode of the symmetrical gyroscope. The second is mechanical tuning from the structure and the third is electrostatic tuning from the peripheral control circuit. Based on the listed results, the paper compares the two tuning modes and analyzes their advantages and disadvantages. The fourth category is the tuning means incorporating the emerging algorithm. On this basis, the elements of improvement for future high-precision symmetric MEMS gyroscopes are envisioned to provide a part of the theoretical reference for the future development direction of sensors in inertial navigation.

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Section: Methodsmentioning

confidence: 99%

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

Zhang

Chen

et al. 2022

Micromachines

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“…It comes before all the out-of-plane modes because of the large thickness-to-width ratio of the rings. It also comes before the n=1 rocking mode due to the phenomenon of mode ordering [16]. This order of the modes helps to improve the common mode rejection of external accelerations.…”

Section: Toroidal Ring Gyroscopementioning

confidence: 98%

On Decoupled Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscopes

Wang¹,

Lin²,

Shin³

et al. 2018

2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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We present a study on the quantification of the energy dissipation mechanisms in Toroidal Ring Gyroscopes (TRG). Our approach is based on suppression of the viscous air damping and controlling thermoelastic dissipation (TED), thus exposing the anchor loss of the device. During testing, energy dissipative factors, such as viscous air damping, TED, and surface loss, were minimized by venting the encapsulation, pumping down to ultrahigh vacuum (UHV), and sweeping the temperature down to 123K, so that anchor loss became the dominant factor that influenced the overall quality factor of the device. The anchor loss limit of the tested TRG was measured to be 1.35 million, and this value was on the same level as predicted by PML method. This study demonstrates the use of a methodology for analysis of energy dissipation mechanisms in MEMS devices and the possibility of quantifying the contribution of each mechanism independently.

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“…Another approach to suppress the acceleration sensitivity for a circular gyroscope is designing MHz frequency Bulk Acoustic Wave Devices [30], which requires nm gaps to drive the stiff mechanical structure. Mode ordering studies similar to [31] can enable a higher n = 1 mode frequency compared to the n = 2 mode. The focus would be substantially increasing common mode stiffness.…”

Section: Gyroscope and Stress Sensor Designmentioning

confidence: 99%

A Ring Gyroscope With On-Chip Capacitive Stress Compensation

Uzunoglu

Erkan

Tatar

2022

J. Microelectromech. Syst.

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We present long-term stress compensation results for a 3.2mm diameter ring gyroscope integrated with 16 capacitive stress sensors for the first time in this work. A bridgetype capacitive sensor is preferred due to its compact size and temperature insensitivity for on-chip stress measurements. The ring design enables a high level of integration and stress sensor-gyroscope output correlation. We first demonstrate the stress sensor operation on a stress test-bed. The drift test for sixteen days at mismatched mode and the drift test for eight days at matched mode in room temperature reveal that the stress compensation can eliminate the gyroscope drift. The stability of the stress compensated gyroscope output can reach 0.008 • /h in mismatched mode and 0.003 • /h in matched mode at an averaging time of two days with no signs of long-term drift. High gyroscope stability is achieved with a partial least-squares fitting algorithm; however, we believe that stress and gyroscope output relation might be linear time-variant with possible nonlinear and hysteresis effects. Analysis of the drive and sense mode frequencies shows that only temperature cannot explain the frequency variations, and the inclusion of stress can comprehensively describe the frequency changes. [2022-0108]

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On ordering of fundamental wineglass modes in toroidal ring gyroscope

Cited by 10 publications

References 6 publications

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

On Decoupled Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscopes

A Ring Gyroscope With On-Chip Capacitive Stress Compensation

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