“…For the imaging of micrometer-thick samples, the spatial resolution is not limited by the electron optics, as is the case for ultrathin amorphous substrates, but by noise or by beam broadening caused by elastic scattering of the electron beam in the specimen (de Jonge, et al, 2010; Reimer & Kohl, 2008). Analytical expressions were obtained for the lateral width, where the broadening on account of (multiple) electron scattering was regarded as a Gaussian distribution for thin films (Doig & Flewitt, 1982; Doig, et al, 1981; Gentsch, et al, 1974; Hall, et al, 1981; Reimer & Kohl, 2008). However, it is not clear if the Gaussian distribution for the lateral probe shape is still valid for samples much thicker than the mean-free-path-length for elastic scattering.…”