Abstract:We present the results of our project for the design and construction and on-sky test of silicon grisms. The fabrication of such devices is a complex and critical process involving litho-masking, anisotropic etching and direct bonding techniques. After the successful fabrication of the silicon grating, we have optimized the bonding of the grating onto the hypotenuse of a silicon prism to get the final prototype. After some critical phases during the experimentation a silicon grism with 363 grooves/mm and a bla… Show more
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