2015
DOI: 10.1109/jsen.2015.2391286
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On the Ammonia Gas Sensing Performance of a RF Sputtered NiO Thin-Film Sensor

Abstract: An interesting ammonia gas sensor based on a p-type NiO thin film, prepared by a radio frequency sputtering process, is studied and demonstrated. As compared with conventional n-type metal-oxide sensors, the studied device shows comparable and good sensing performance, including a high-sensing response ratio of 289%, a lower response time of 31 s, and a lower recovery time of 78 s, under an introduced 1000 ppm NH 3 /air gas at 250°C and 350°C, respectively. In addition, the studied sensor device exhibits a low… Show more

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Cited by 78 publications
(26 citation statements)
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“…Based on this model, it is possible to describe second order kinetics assuming that the actual solid surfaces are energetically heterogeneous. In reactions involving the adsorption of gases on a solid surface, equation (4) is commonly used in the kinetics of the chemisorption of gases on solids . The general form of Elovich model can be expressed as, trueq=[]1αprefixln(α'α)+[]1αprefixln(t) …”
Section: Resultsmentioning
confidence: 99%
“…Based on this model, it is possible to describe second order kinetics assuming that the actual solid surfaces are energetically heterogeneous. In reactions involving the adsorption of gases on a solid surface, equation (4) is commonly used in the kinetics of the chemisorption of gases on solids . The general form of Elovich model can be expressed as, trueq=[]1αprefixln(α'α)+[]1αprefixln(t) …”
Section: Resultsmentioning
confidence: 99%
“…Optical fiber sensors are deployed for detection of different hazardous gases including ammonia (NH 3 ). Ammonia is widely used gas in different applications such as chemical industries, agricultures and medicines [18,19] . Natural NH 3 level present in the atmosphere is in low ppb (1-5 ppb) levels.…”
Section: Etched-tapered Optical Fiber Sensorsmentioning
confidence: 99%
“…Additionally, NH 3 sensors remain the potential candidates employed in agriculture, chemical industries, pharmaceutical, hydrogen fuels, defense and food processing industries to monitor the NH 3 leak in controlled atmospheres. Hence, the development of highly-sensitive and reliable NH 3 sensors to continuously detect leakages NH 3 is a key issue for the safety of environments [19].…”
Section: Etched-tapered Optical Fiber Sensorsmentioning
confidence: 99%
“…For all types of sensors, including SAW sensors, it is important to operate at RT, and at the same time, to ensure that a signal is obtained at the lowest analyte concentrations. The reference metal oxide semiconductors used in the domain of sensors include In 2 O 3 [ 34 , 107 , 108 , 109 , 110 ], ZnO [ 45 , 111 , 112 , 113 ], Co 3 O 4 [ 114 , 115 , 116 ], SnO 2 [ 99 , 117 ], CuO/Cu 2 O [ 100 , 118 ], TiO 2 [ 24 , 119 ], NiO [ 58 , 120 ], Fe 2 O 3 [ 121 , 122 ], and WO 3 [ 23 , 123 ]. They were most often used to detect volatile organic compounds, hydrogen, ammonia, etc.…”
Section: Sensitive Materials Used In Gas Detectionmentioning
confidence: 99%