2014
DOI: 10.1063/1.4896841
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On the bipolar resistive-switching characteristics of Al2O3- and HfO2-based memory cells operated in the soft-breakdown regime

Abstract: In this article, we investigate extensively the bipolar-switching properties of Al2O3- and HfO2-based resistive-switching memory cells operated at low current down to <1 μA. We show that the switching characteristics differ considerably from those typically reported for larger current range (>15 μA), which we relate as intrinsic to soft-breakdown (SBD) regime. We evidence a larger impact of the used switching-oxide in this current range, due to lower density of oxygen-vacancy (Vo) defects in the … Show more

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Cited by 32 publications
(28 citation statements)
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“…The experimental results (reduced I Reset , oxide dependent LRS, similar variability for LRS and HRS) may be explained by bulk switching and conduction mechanisms rather than filamentary ones (Chen et al, 2014; Goux et al, 2014) when very low I CC (<20 μA) are used. We believe that in this case the current conduction in the LRS is dominated by trap-assisted tunneling as is the case for the HRS (Wong et al, 2012).…”
Section: Oxram Electrical Device Analysismentioning
confidence: 91%
“…The experimental results (reduced I Reset , oxide dependent LRS, similar variability for LRS and HRS) may be explained by bulk switching and conduction mechanisms rather than filamentary ones (Chen et al, 2014; Goux et al, 2014) when very low I CC (<20 μA) are used. We believe that in this case the current conduction in the LRS is dominated by trap-assisted tunneling as is the case for the HRS (Wong et al, 2012).…”
Section: Oxram Electrical Device Analysismentioning
confidence: 91%
“…On the other hand, researchers also started to see differences in the detailed behavior of the different oxide materials, while also interesting properties of cells made by stacking bilayers of these metal oxides are studied [76]- [78]. Also, the effect of dopants has been studied [79].…”
Section: E New Insights and Developmentsmentioning
confidence: 97%
“…For comparison, OxRRAM crossbar cells were integrated onto select transistor in a 1T1R circuit scheme. Three different cells were made using amorphous atomic‐layer‐deposited HfAlO (5 nm), Al 2 O 3 (1.6 nm)/HfO 2 (2.4 nm), or Ta 2 O 5 (5 nm), sandwiched between a TiN BE and either a Hf (10 nm) or a Ta (10 nm) TE .…”
Section: Test Vehicle and Device Characteristicsmentioning
confidence: 99%