On the Deposition of an FexNi1 – x Film by the Magnetron Sputtering of a Multilayer Target

Shapovalov, V. I.; Ivantsov, M. O.; Krainov, N. S.

doi:10.1134/s1027451023070479

J. Surf. Investig.

2023

DOI: 10.1134/s1027451023070479

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On the Deposition of an FexNi1 – x Film by the Magnetron Sputtering of a Multilayer Target

V. I. Shapovalov,

M. O. Ivantsov,

N. S. Krainov

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On the Deposition of an FexNi1 – x Film by the Magnetron Sputtering of a Multilayer Target

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References 22 publications

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