2007
DOI: 10.1007/s11340-006-0653-6
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On the Development of a Mesoscale Friction Tester

Abstract: MEMS and NEMS devices typically have a large surface area to volume ratio. As a result, a major concern in the development of such devices is friction. Contact radii in MEMS and NEMS devices are expected to range from 10 j8 Show more

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Cited by 13 publications
(17 citation statements)
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“…A one to one correspondence between these relationships is used as a demonstration of the modified Tabor parameter. Friction experiments with the MFT [4] were used to perform the examination.…”
Section: Examination Of the Modified Tabor Parametermentioning
confidence: 99%
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“…A one to one correspondence between these relationships is used as a demonstration of the modified Tabor parameter. Friction experiments with the MFT [4] were used to perform the examination.…”
Section: Examination Of the Modified Tabor Parametermentioning
confidence: 99%
“…2) and its operation have been described in detail by Wang et al [4]. It consists of a sensor cantilever beam, laser diode, two dimensional position sensitive detector (PSD), and a piezo X Y Z positioning and scanning stage.…”
Section: Mft Apparatusmentioning
confidence: 99%
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“…Interfacial coefficient of sliding friction (hereafter referred to simply as friction) plays a major role in many geophysical systems and engineering applications such as microelectromechanical devices [1], machining (to avoid stick-slip events) [2,3], and brakes [4]. One of the more important geophysical phenomena controlled by friction is crustal faulting and the generation of earthquakes.…”
Section: Introductionmentioning
confidence: 99%
“…A mesoscale friction tester (MFT) was modified to allow the passage of direct current (dc) while simultaneously measuring the coefficient of friction and the parameters associated with current flow. Details of the construction and operation of the MFT are presented by Wang et al [1]. The MFT is capable of performing friction studies with contact radii that range from 10 nm to 10 μm and contact forces from 10 -6 to 10 -3 N. This force scale is beyond that of an atomic force microscope (AFM) and an interfacial force microscope (IFM) but is below that of a surface force apparatus (SFA).…”
Section: Introductionmentioning
confidence: 99%