On the Finite-Element Analysis of Resonance MEMS Structures based on Acoustic Lamb Waves

Abstract

This paper considers issues of modeling ultra-high frequency MEMS resonators based on acoustic Lamb waves. In addition, the analysis of factors that determine whether it is possible to increase resonators working frequency and electromechanical coupling factor is carried out. Influence of resonator excitation scheme and acoustic waveguide thickness for a range of piezoelectric materials (i.e. AlN, ZnO, GaN) on phase velocity for acoustic Lamb wave zero modes is investigated. As a result, we've got estimations determining dependence of resonators electromechanical coupling coefficient on their geometry.

Numerical modelling of Lamb wave propagation in 2D plate structures

“…Using FEA, the entire structural model is spatially discretised, and a series of partial differential equations are solved using adequate boundary conditions for the time response of the model. FEA is a powerful tool for the exploration of Lamb wave responses to various geometries [21], materials [22], damages [23][24][25] and sensor-material interactions [26]. Analysis of Lamb waves using FEA is also one of the most accessible methods due to the availability of commercial software.…”