2014
DOI: 10.1016/j.vacuum.2014.01.002
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On the gas dependence of thermal transpiration and a critical appraisal of correction methods for capacitive diaphragm gauges

Abstract: Paris 06, UMR 7092, LPMAA (now LERMA2), Tour 32-33 2 e ét., 4 pl. Jussieu, 75005 Paris, France b CNRS, UMR 7092, LPMAA (now LERMA2), Tour 32-33 2 e ét., 4 pl. Jussieu, 75005 Paris, France Thermal transpiration effects are commonly encountered in low pressure measurements with capacitance diaphragm gauges. They arise from the temperature difference between the measurement volume and the temperature stabilised manometer. Several approaches have been proposed to correct for the pressure difference, but surface an… Show more

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Cited by 12 publications
(13 citation statements)
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“…Both dynamic and static calibrations agreed very well, resulting in the same calibration parameters. As the transfer standard PR4000 was calibrated in the low range 0.00-0.1 mbar, a linear extrapolation was applied, followed by a correction as the sensor was used at room temperature instead of the recommended temperature of 45 • C, using the formula provided by Daudé et al (2013). It was observed that this treatment produced results that agreed with the results of a calibration of the same sensor performed at 45 • C one month previously by the LNE, confirming the validity of our in situ calibration process.…”
Section: Pressure Measurementsmentioning
confidence: 99%
“…Both dynamic and static calibrations agreed very well, resulting in the same calibration parameters. As the transfer standard PR4000 was calibrated in the low range 0.00-0.1 mbar, a linear extrapolation was applied, followed by a correction as the sensor was used at room temperature instead of the recommended temperature of 45 • C, using the formula provided by Daudé et al (2013). It was observed that this treatment produced results that agreed with the results of a calibration of the same sensor performed at 45 • C one month previously by the LNE, confirming the validity of our in situ calibration process.…”
Section: Pressure Measurementsmentioning
confidence: 99%
“…The uncertainty of γ comprises the reproducibility of test measurements (1.9 %) and varying levels of LN 2 that change the effective volume of the cold finger (5.8 %). Residual pressure measurements are impacted by the thermal transpiration effect (Daudé et al, 2014) caused by the heating of the gauge (45 • C). It can be taken into account by assuming that the actual pressure is somewhere between the indicated value and the maximum of 4.2 % induced by thermal transpiration.…”
Section: Sample Puritymentioning
confidence: 99%
“…A residual gas analyzer (RGA) allows in situ sampling of the precursor gases within the gas cabinet, as well as leak checking, before opening to the MBE chamber. Four capacitive manometers provide a true measure of pressure independent of gas species [52]. Gases are delivered to the growth chamber by either a cold injector or hot injector, allowing the freedom to use multiple gases simultaneously, including gases that require pre-cracking prior to their arrival at the wafer surface and those that do not.…”
Section: Growth System and Techniquesmentioning
confidence: 99%