“…The lid velocities are 10m/s, 100m/s and 1000m/s for cases I, II and III, respectively. Selected velocities are typical lid velocities to investigate the micro cavity flow in low Knudsen number regimes (Amiri-Jaghargh, Roohi, Niazmand, and Stefanov 2012;Amiri-Jaghargh, Roohi, Niazmand, and Stefanov 2013;Mohammadzadeh, Roohi, and Niazmand 2013;John, Gu, and Emerson 2011;John, Gu, and Emerson 2010;Jiang, Fan, and Shen 2003;Sheremet and Pop 2015;Safdari and Kim 2015;Gutt and Groan 2015;Rana, Torrilhon, and Struchtrup 2013).…”