On the measurement of mtf using periodic patterns of rectangular and triangular wave-forms

Nijhawan, Om Prakash; Datta, P. K.; Bhushan, Jagat

doi:10.1088/0335-7368/6/1/304

Cited by 11 publications

(10 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As such, the BPRG and BPRA standards satisfy the characteristics of a certifiable ITF calibration artifact: functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing errors. This is in contrast to most of the common test patterns used in MTF measurements, including knife-edge sources (step-height artifacts) [5,[18][19][20][21][22], bar targets [23], sinusoidal [24] and periodical patterns [25,26], which do not meet all these requirements. *vvyashchuk@lbl.gov; phone 1 510 495-2592; www.lbl.gov.…”

Section: Introductonmentioning

confidence: 91%

Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards

Yashchuk

Munechika²,

Rochester³

et al. 2022

Advances in X-Ray/Euv Optics and Components XVII

View full text Add to dashboard Cite

The reliability of the instrument transfer function (ITF) calibration technique based on binary pseudo-random array (BPRA) standards is investigated and demonstrated in application to interferometric microscopes. We demonstrate the linearity of the calibration (that is, independence of the ITF calibration on the standards root-mean-square roughness) via comparison of the ITF measurements with a number of artifacts with the etched depth varying from 30 nm to 120 nm. We also show that the calibration does not depend on the surface reflectivity, at least in the range between ~36% and ~80%. The criteria for selection of the geometrical parameters of the BPRA standard design appropriate for a particular interferometric microscope arrangement (including optical magnification), as well as the data acquisition and analysis procedures for different applications are also discussed.

show abstract

Section: Introductonmentioning

confidence: 91%

Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards

Yashchuk

Munechika²,

Rochester³

et al. 2022

Advances in X-Ray/Euv Optics and Components XVII

View full text Add to dashboard Cite

show abstract

“…45,46 Reliability of the PSD data for these and other applications depends on experimental methods available for comprehensive characterization and calibration of the spatial frequency response of the metrology instruments in use. [47][48][49][50][51][52][53][54][55][56][57][58][59][60][61][62][63][64][65] There are also problems inherent in the statistical description of surface metrology data that we discuss in the next section.…”

Section: Introductionmentioning

confidence: 99%

Reliable before-fabrication forecasting of expected surface slope distributions for x-ray optics

Yashchuk

2012

Opt. Eng

View full text Add to dashboard Cite

Numerical simulation of the performance of new beamlines and those under upgrade requires sophisticated and reliable information about the expected surface slope and height distributions of planned x-ray optics before they are fabricated. Obtaining such information should be based on the metrology data measured from existing mirrors that are made by the same vendor and technology; but, generally, with different sizes, slope and height rms variations. In this work, we demonstrate a method for highly reliable forecasting of the expected surface slope distributions of the prospective x-ray optics. The method is based on an autoregressive moving average (ARMA) modeling of the slope measurements with a limited number of parameters. With the found parameters of the ARMA model, the surface slope profile of an optic with the newly desired specification can reliably be forecast. We demonstrate the high accuracy of this type of forecasting by comparing the power spectral density distributions of the measured and forecast slope profiles.

show abstract

“…Fabrication of accurate sine wave gratings can however pose technical problems. Whilst in more recent years this has been overcome, for example by using the interference pattern formed from two (or more) plane waves to form a suitable grating [121] or modern lithographic procedures, originally the idea developed to employ square wave [107,122], or even triangular [123] test patterns due to the relative ease with which they could be made. It should also be noted that such targets cover more of the spatial frequency domain in a single image.…”

Section: H(m)mentioning

confidence: 99%

Determination of the transfer function for optical surface topography measuring instruments—a review

Foreman

Giusca

Coupland

et al. 2013

Meas. Sci. Technol.

View full text Add to dashboard Cite

A significant number of areal surface topography measuring instruments, largely based on optical techniques, are commercially available. However, implementation of optical instrumentation into production is currently difficult due to the lack of understanding of the complex interaction between the light and the component surface. Studying the optical transfer function of the instrument can help address this issue. Here a review is given of techniques for the measurement of optical transfer functions. Starting from the basis of a spatially coherent, monochromatic confocal scanning imaging system, the theory of optical transfer functions in three-dimensional (3D) imaging is presented. Further generalizations are reviewed allowing the extension of the theory to the description of conventional and interferometric 3D imaging systems. Polychromatic transfer functions and surface topography measurements are also discussed. Following presentation of theoretical results, experimental methods to measure the optical transfer function of each class of system are presented, with a focus on suitable methods for the establishment of calibration standards in 3D imaging and surface topography measurements.

show abstract

On the measurement of mtf using periodic patterns of rectangular and triangular wave-forms

Cited by 11 publications

References 3 publications

Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards

Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards

Reliable before-fabrication forecasting of expected surface slope distributions for x-ray optics

Determination of the transfer function for optical surface topography measuring instruments—a review

Contact Info

Product

Resources

About