On the mechanism of hydrogen sensing with SiO2 modificated high temperature Ga2O3 sensors

Hydrogen adsorption on β-Ga2O3(100) surface containing oxygen vacancies

“…Polycrystalline semiconducting Ga 2 O 3 thin films represent a promising material for sensors devices to detect molecular hydrogen [7][8][9], and catalysts containing supported gallium are known to be active in light alkane dehydrogenation and/or aromatization (Cyclar process) [10][11][12]. Recently, Collins et al have highlighted that b-Ga 2 O 3 alone is able to dissociate hydrogen molecules at temperatures higher than 500 K and then hydrogenate adsorbed CO 2 stepwise from formate to methoxy groups [13].…”

Hydrogen sensitive GA2O3 Schottky diode sensor based on SiC

“…Their response to various hydrogen gas concentrations at different forward bias currents and at different operating temperatures is investigated. Conductometric gas sensors based on Ga 2 O 3 have been reported for monitoring hydrocarbons [10] and hydrogen [11], hence it was chosen as the reactive insulator. The platinum layer has two roles: to act as a catalyst for the chemisorption of hydrogen on the surface (as the electrical properties of platinum depend on hydrogen content) and to serve as the Schottky contact.…”

Application of membranes and filtering films for gas sensors improvements

“…The group of Egashira has also proposed several papers on the detection of H 2 using a thin SiO 2 filter, but prepared by different methods including the sol -gel method [2,33]. More recently, the German group of Siemens has also proposed to deposit thin films of SiO 2 by RF sputtering at the surface of thick Ga 2 O 3 films for H 2 detection [34,35].…”