On the Modelling of the Direct Bonding of Two Silicon Surfaces

Lebon, Frédéric; Cocheteau, Natacha; Rosu, Iulian; Maurel-Pantel, Aurélien; Zaid, Sonia Ait; Larclause, Isabelle Savin de

doi:10.4203/ccp.99.143

Cited by 3 publications

(2 citation statements)

References 20 publications

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“…The difference in surface energy between non-bonded and debonded surfaces was found to be approximately 20%. Surface wettability and XPS results show the quasi reversibility of the process [28] [30].…”

Section: Wetting Tests and X-ray Spectroscopymentioning

confidence: 99%

Influence of roughness on mechanical strength of direct bonded silica and Zerodur® glasses

Cocheteau

Maurel-Pantel

Lebon

et al. 2016

International Journal of Adhesion and Adhesives

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Influence of roughness on mechanical strength of direct bonded silica and Zerodur® glasses Direct bonding is of particular interest for optical system manufacturing for spatial application. This process requires very precise physical and chemical preparations of surface, especially roughness controls. Thus, this paper proposes to understand and discuss the roughness influence on mechanical strength and bonding energy of an elementary mechanical structure after a room temperature bonding and an annealing at optimal temperature. First, surfaces are characterised and roughness is measured. At the same time, the performances of fused silica and Zerodur® glasses are compared. Then interface properties are measured using double shear and wedge tests. At the end of the paper, a discussion, based on literature models, is proposed to explain the existence of an optimum of roughness put in evidence in experimental results.

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Section: Wetting Tests and X-ray Spectroscopymentioning

confidence: 99%

Influence of roughness on mechanical strength of direct bonded silica and Zerodur® glasses

Cocheteau

Maurel-Pantel

Lebon

et al. 2016

International Journal of Adhesion and Adhesives

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“…Surface wettability and XPS results confirm the reversibilitywith damagingof the process. [27] Indeed, one characteristic of the direct bonding process when no thermal treatments are applied is the reversibility of the bonding. [28] Figure 6.…”

Section: Wetting Tests and X-ray Spectroscopymentioning

confidence: 99%

Process parameters influence on mechanical strength of direct bonded surfaces for both materials: silica and Zerodur^®glasses

Cocheteau¹,

Maurel-Pantel²,

Lebon³

et al. 2014

Journal of Adhesion Science and Technology

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Direct bonding is of particular interest for optical system manufacturing for spatial application. This technology is already used in terrestrial optical system manufacturing because of the very high precision of the process and complex geometries are able to bond. However, even if a first prototype already passed with success space environment test, quantification and improvement of the mechanical strength of assemblies are essential to validate the assembly's life expectancy and to validate the European Space Agency standards. So, this work proposes to study the influence of process parameters, such as roughness, relative air humidity during room temperature bonding, annealing time and temperature, on mechanical strength of an elementary mechanical structure using a double shear test procedure and cleavage tests. At the same time, the performances of fused silica and Zerodur ® glasses are compared. For the process considered in this study, a parallel is made between chemical phenomena, surface roughness and mechanical strength. In the end, cleavage tests confirm the choice of the optimal process parameters and highlight a damaging phenomenon of bonded interfaces with successive re-adhesion.

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Numerical and experimental investigations on the hybrid bonding of Cu/SiÜ2 patterned surfaces using a cohesive model

Sart

Estevez

Fiori

et al. 2016

2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and

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On the Modelling of the Direct Bonding of Two Silicon Surfaces

Cited by 3 publications

References 20 publications

Influence of roughness on mechanical strength of direct bonded silica and Zerodur® glasses

Influence of roughness on mechanical strength of direct bonded silica and Zerodur® glasses

Process parameters influence on mechanical strength of direct bonded surfaces for both materials: silica and Zerodur^®glasses

Numerical and experimental investigations on the hybrid bonding of Cu/SiÜ2 patterned surfaces using a cohesive model

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On the Modelling of the Direct Bonding of Two Silicon Surfaces

Cited by 3 publications

References 20 publications

Influence of roughness on mechanical strength of direct bonded silica and Zerodur® glasses

Influence of roughness on mechanical strength of direct bonded silica and Zerodur® glasses

Process parameters influence on mechanical strength of direct bonded surfaces for both materials: silica and Zerodur®glasses

Numerical and experimental investigations on the hybrid bonding of Cu/SiÜ2 patterned surfaces using a cohesive model

Contact Info

Product

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Process parameters influence on mechanical strength of direct bonded surfaces for both materials: silica and Zerodur^®glasses