On The Necessity of Multiphysics Simulation Experiments in MEMS Teaching

Abstract

Microelectromechanical system (MEMS) is an interdisciplinary research and education field.The multiphysics simulation can make the abstract theory on MEMS design concrete and improve the learning efficiency. A MEMS course design is presented in this paper. The content consists of fundamental theory on MEMS design and hands-on simulation experiments. The essence of multiphysics coupling is revealed. Simulation cases are displayed. Teaching approaches are applied in the course design including handson simulation experiments, from an easy task to the difficult one and integration of simulation cases and theory lectures. The course design has guiding significance for other science and engineering curriculum design.