On the quality of quality-factor in gap-closing electrostatic resonators

Shmulevich, Shai; Lerman, M; Elata, David

doi:10.1088/0960-1317/23/11/115010

Cited by 7 publications

(4 citation statements)

References 32 publications

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“…Some of them as gap-closing effect [42] and ohmic losses [41] depends on the DC voltage. However, only the ohmic losses from the electrons moving on and off the resonator due to capacitive coupling to a nearby gate can explain the observed important influence of the DC voltage on the evolution of the quality factor, in particular according to an inverse quadratic variation :…”

Section: Linear Eigenfrequency Analysismentioning

confidence: 99%

Experimental characterization of nonlinear static and dynamic behaviors of circular capacitive microplates with initial deflection

et al. 2021

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HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

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Section: Linear Eigenfrequency Analysismentioning

confidence: 99%

Experimental characterization of nonlinear static and dynamic behaviors of circular capacitive microplates with initial deflection

et al. 2021

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“…Specifically, Q values were extracted from the sharpness of measured frequency sweeps, at different vacuum levels [31]. At each vacuum level, the device was then operated as a parametric resonator.…”

Section: Measured Response Thresholdmentioning

confidence: 99%

A MEMS Implementation of a Classic Parametric Resonator

Shmulevich

Grinberg

Elata

2015

J. Microelectromech. Syst.

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We present a microelectromechanical systems realization of a classic parametric resonator. This parametric resonator is ideal in the sense that the electrostatic stiffness, which may be time modulated, is not affected by motion. We also present a simple, efficient, and intuitive model of parametric excitation. This model predicts the minimal modulation amplitude required to obtain an unbounded response in a parametric system with linear damping. We show experimental results in which the system is operated as a Meissner resonator.[ 2014-0381]Index Terms-Electrostatic actuators, parametric excitation, parametric resonators, tapered comb-drive. 1057-7157

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“…Linear resonators with high quality-factors find many applications as filters, sensors, and oscillators. The suspension of choice in many comb-drive resonators is the folded-beam suspension [1][2][3][4]. Standard folded-beam suspensions (Fig.…”

Section: Introductionmentioning

confidence: 99%

Dynamically-balanced folded-beam suspensions

Shmulevich

Hotzen

Elata

2015

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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We present a complete methodology for designing a new folded-beam suspension which responds as a linear spring at the fundamental resonance. This is in sharp contrast to the response of standard folded-beam suspensions. The static response of the standard foldedbeam suspension is linear over a wide range of motions. But, surprisingly, the dynamic response of the standard folded-beam suspension is strongly nonlinear for small motion amplitudes that are larger than the width of the flexure beams. We have previously shown experimental evidence of this problem with the standard suspension. In contrast, the stiffness of the new dynamically balanced folded-beam suspension is not affected by motion amplitude. In the present work we show new experimental evidence demonstrating that the new design solves this problem.

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On the quality of quality-factor in gap-closing electrostatic resonators

Cited by 7 publications

References 32 publications

Experimental characterization of nonlinear static and dynamic behaviors of circular capacitive microplates with initial deflection

Experimental characterization of nonlinear static and dynamic behaviors of circular capacitive microplates with initial deflection

A MEMS Implementation of a Classic Parametric Resonator

Dynamically-balanced folded-beam suspensions

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