1984
DOI: 10.1002/ctpp.19840240504
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On the Quantitative Determination of Cross Sections of Ionization of Molecules by Electronic Collisions

Abstract: I t is tested the applicability of formulae for atomic ionization to molecules. The best fit, between theoretical and experimental values is given by the formula of GRYZINSRI. The calculations require the knowledge of the orbital structure.If no detailed information on electronic molecular structure is avrtiable, then approximation is attained using the LOTZ formula with three fitting parameters.Results are given especially for organic molecules and C1 and F containing etching gases.

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Cited by 18 publications
(5 citation statements)
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“…The DM approach also works well for hydrocarbons. 35 The BEB cross sections for CH 2 and CH 3 are compared to the experimental data by Baiocchi et al 36 for CD 2 ͑Fig. 9͒ and CD 3 ͑Fig.…”
Section: Hydrocarbonsmentioning
confidence: 99%
“…The DM approach also works well for hydrocarbons. 35 The BEB cross sections for CH 2 and CH 3 are compared to the experimental data by Baiocchi et al 36 for CD 2 ͑Fig. 9͒ and CD 3 ͑Fig.…”
Section: Hydrocarbonsmentioning
confidence: 99%
“…The conventional additivity rule as introduced by O ¨tvos and Stevenson 6 and refined by Fitch and Sauter 7 and Deutsch and Schmidt 8 uses the concept that the molecular ionization cross section σ can be expressed in the form where b is a constant, n i is the number of atoms "i" in the molecule, and σ i is the constant contribution of each atom "i" to the molecular ionization cross section. The additivity concept as represented by eq 1 is in principle not capable of reproducing the "inversion" of the molecular ionization cross sections which was first observed experimentally for the SiF x (x ) 1-3) free radicals [19][20][21] and discussed by Deutsch et al 22 "Inversion" here refers to the fact that the total single ionization cross section † Ernst-Moritz-Arndt Universita ¨t.…”
Section: Concept Of the Modified Additivity Rulementioning
confidence: 99%
“…in fusion edge plasmas and in plasma processing) has stimulated the use of simplistic additivity rules to estimate molecular ionization cross sections. Many variants of the additivity rule, whose concept was first introduced by Ötvos and Stevenson, can be found in the literature. , They all rely on the concept that the molecular ionization cross section is derived by adding in some fashion the ionization cross sections of the atomic constituents of the molecule with or without accounting for molecular bonding and/or weighting factors for the atomic cross sections. In addition to these rather simple approaches, there have been semiempirical and semiclassical approaches including the DM formalism, , geometric approaches, , and the more rigorous Binary−Encounter Bethe (BEB) theory of Kim and collaborators which combines the additivity concept with quantum mechanically calculated molecular quantities.…”
Section: Introductionmentioning
confidence: 99%
“…Relatively less research of electron scattering deals with the CH3F molecule. Investigations of the total ionization cross section were performed by Beran and Kevan (1969) (experimentally) and Deutsch and Schmidt (1984) (semi-empirically). Griffiths and Harris (1988) measured single-and double-ionization energies.…”
Section: Introductionmentioning
confidence: 99%