(M. Dries).
AbstractThin-film based phase plates are meanwhile a widespread tool to enhance the contrast of weak-phase objects in transmission electron microscopy (TEM). The thin film usually consists of amorphous carbon, which suffers from quick degeneration under the intense electron-beam illumination. Recent investigations have focused on the search for alternative materials with an improved material stability.This work presents thin-film based phase plates fabricated from metallic glass alloys, which are characterized by a high electrical conductivity and an amorphous structure. Thin films of the zirconiumbased alloy Zr 65.0 Al 7.5 Cu 27.5 (ZAC) are prepared and their phase-shifting properties are tested. The ZAC-alloy film is investigated by different TEM techniques, which reveal a range of beneficial characteristics. Particularly favorable is the small probability for inelastic plasmon scattering, which is promising to improve the performance of thin-film based phase plates in phase-contrast TEM.