On The Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime

Zhang, Hemin; Pandit, Milind; Sobreviela, Guillermo; Parajuli, Madan; Chen, Dongyang; Sun, Jiangkun; Zhao, Chun; Seshia, Ashwin A.

doi:10.1109/mems51782.2021.9375204

Cited by 8 publications

(3 citation statements)

References 13 publications

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“…Moreover, the performance of mode‐localized sensors (weakly coupled MEMS resonators) in the nonlinear Duffing regime has recently been investigated. [ 411,412 ] The results show that operating the device in bifurcation points improves noise floor compared with its linear counterpart; however, its sensitivity reduces. As a result, in designing such sensors, a trade‐off between the minimum noise and maximum sensitivity should be considered according to the intended application.…”

Section: Fundamental Concepts Of Nano/micromechanical Resonatorsmentioning

confidence: 99%

“…The practical implementation is still very problematic and needs further improvements in spite of the significant advantages for the mode-localized sensors, which resulted in conducting further studies to improve the performance of mode-localized devices and reduce their restrictions. [272,273,[411][412][413][414][415] For instance, Zhao et al [413] demonstrated an optimal operating region for improving the resolution of amplitude ratio measurements. Further, a minimum noise floor of ≈16 ppbHz −1/2 was obtained in terms of normalized stiffness perturbation by optimizing the coupling strength and initial stiffness mismatch.…”

Section: Amplitude Shift-based Crasmentioning

confidence: 99%

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A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Ghaemi

Nikoobin

Ashory

2022

Adv Elect Materials

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Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical resonators, provide an unprecedented platform for investigating a wide range of applications in both fundamental physical phenomena (such as quantum‐level problems) and engineering and applied sciences (like sensing physical quantities and signal processing). In sensing context, these tiny resonators are invaluable tools for detecting weak forces and single molecules. Measuring such small variations in sub‐nanometer amplitudes at high frequencies has created many practical challenges. Therefore, maximizing the responsivity to a specified input parameter and minimizing the responsivity to other inputs such as noise are considered as the optimal design for the excellent performance in nanoresonators. The present review aims to summarize some of the recent progress in this rapidly advancing field. Specifically, more attention is paid to the topics related to the dynamical behaviors of micro/nanoresonator and their practical applications. First, the theory behind micro/nanoresonators is described. Then a summary is presented of the basic concepts in resonant devices. In addition, several commonly dynamical techniques to enhance sensitivity are introduced. Finally, the devices are classified based on linear and nonlinear, single and array, symmetric and asymmetric, and frequency shift‐based and amplitude shift‐based resonators, along with the relative advantages and disadvantages of each one in engineering applications.

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Section: Fundamental Concepts Of Nano/micromechanical Resonatorsmentioning

confidence: 99%

Section: Amplitude Shift-based Crasmentioning

confidence: 99%

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Ghaemi

Nikoobin

Ashory

2022

Adv Elect Materials

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“…In contrast to the sensors based on the mode localization effect, they exhibit the ultra-high parametric sensitivity (up to three to four orders of magnitude [ 31 , 32 , 33 ]) and the coupling between the two resonators is constructed mechanically or electrostatically. In the weakly coupled resonator (WCR), a small perturbation will lead to an energy redistribution [ 34 ].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect

Lyu

Wang

et al. 2022

Micromachines

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A mode-localized ΔE-effect magnetic sensor model is established theoretically and numerically. Based on the designed weakly coupled resonators with multi-layer film structure, it is investigated how the ΔE-effect of the magnetostrictive film under the external magnetic field causes the stiffness perturbation of the coupled resonators to induce the mode localization effect. Using the amplitude ratio (AR) as the output in the mode-localized ΔE-effect magnetic sensor can improve the relative sensitivity by three orders of magnitude compared with the traditional frequency output, which has been verified by simulations based on the finite element method (FEM). In addition, the effects of material properties and geometric dimensions on sensor performance parameters, such as sensitivity, linear range, and static operating point are also analyzed and studied in detail, providing the theoretical basis for the design and optimization of the mode-localized ΔE-effect magnetic sensor in different application scenarios. By reasonably optimizing the key parameters of the weekly coupled resonators, a mode-localized ΔE-effect magnetic sensor with the sensitivity of 18 AR/mT and a linear range of 0.8 mT can be achieved.

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A mechanically coupled three degree-of-freedom resonator with tunable stiffness sensitivity

Chen¹,

Tsukamoto²,

Tanaka³

2022

Sensors and Actuators A: Physical

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On The Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime

Cited by 8 publications

References 13 publications

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect

A mechanically coupled three degree-of-freedom resonator with tunable stiffness sensitivity

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