2015
DOI: 10.1016/j.jcrysgro.2015.02.032
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On the shape of n-type Czochralski silicon top ingots

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Cited by 3 publications
(1 citation statement)
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“…This problem becomes increasingly complex with an increase in the crystal diameter. The requirements to the homogeneity of the electrophysical properties of the single crystals become increasingly strict because the semiconductor industry transits to submicron technologies [4][5]. Optimization of single crystal growth process modes requires a combined effort including physical and mathematical simulation of the growth processes as well as analysis of the homogeneity of the as-grown crystals.…”
Section: Introductionmentioning
confidence: 99%
“…This problem becomes increasingly complex with an increase in the crystal diameter. The requirements to the homogeneity of the electrophysical properties of the single crystals become increasingly strict because the semiconductor industry transits to submicron technologies [4][5]. Optimization of single crystal growth process modes requires a combined effort including physical and mathematical simulation of the growth processes as well as analysis of the homogeneity of the as-grown crystals.…”
Section: Introductionmentioning
confidence: 99%