On the specific features of silicon carbide heteropolytype epitaxy

Davydov, S. Yu.; Лебедев, А. А.; Усиков, А. С.

doi:10.17586/2226-1494-2015-15-4-632-639

Cited by 1 publication

(1 citation statement)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The main challenge to be solved on the way is the controlled design of a sharp interface between the constituent polytypes in the heterostructure or the multilayers. This is a challenge up to now [37,57,74,75]. These new types of structures offer, with their specific properties, new types of application fields.…”

Section: Introductionmentioning

confidence: 99%

Imprinting the Polytype Structure of Silicon Carbide by Rapid Thermal Processing

Pezoldt

Cimalla

2020

Crystals

View full text Add to dashboard Cite

Silicon carbide is a material with a multistable crystallographic structure, i.e., a polytypic material. Different polytypes exhibit different band gaps and electronic properties with nearly identical basal plane lattice constants, making them interesting for heterostructures without concentration gradients. The controlled formation of this heterostructure is still a challenge. The ability to adjust a defined temperature–time profile using rapid thermal processing was used to imprint the polytype transitions by controlling the nucleation and structural evolution during the temperature ramp-up and the steady state. The influence of the linear heating-up rate velocity during ramp-up and steady-state temperature on the crystal structure of amorphized ion-implanted silicon carbide layers was studied and used to form heteropolytype structures. Integrating the structural selection properties of the non-isothermal annealing stage of the ion-implanted layers into an epitaxial growth process allows the imprinting of polytype patterns in epitaxial layers due to the structural replication of the polytype pattern during epitaxial growth. The developed methodology paves the way for structural selection and vertical and lateral polytype patterning. In rapid thermal chemical vapor deposition, the adjustment of the process parameters or the buffer layer allowed the nucleation and growth of wurtzite silicon carbide.

show abstract

Section: Introductionmentioning

confidence: 99%