On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment

Abstract

This work presents the results of the experimental and theoretical study of the static pull-in of tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on the combination of inductive levitation and electrostatic actuation. A semi-analytical model to study such a pull-in phenomenon is developed, for the first time, as a result of using the qualitative technique based on the Lagrangian approach to analyze inductive contactless suspensions and a recent progress in the calculation of mutual inductance and force between two circular filaments. The obtained non-linear model, accounting for two degrees of freedom of the actuator, allows us to predict accurately the static pull-in displacement and voltage. The results of modeling were verified experimentally and agree well with measurements.

Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

“…Typically, they are classified according to the nature of implemented force. The most popular are electric (Table 2) and magnetic levitation microactuators [45]. A comprehensive review of the benefits provided by levitation, operating principles (Figure 3), structures, materials, and fabrication methods are provided in [46].…”

“…Electrostatic actuation and inductive levitation were combined in a hybrid levitation microactuator (Figure 4). The actuator consists of the Pyrex structure and the silicon structure with the dimensions: 9.4 mm × 7.4 mm × 1.1 mm [45]. The non-linear dynamic behavior of a repulsive levitation force actuator was investigated in [62].…”

High Precision Magnetic Levitation Actuator for Micro-EDM

“…Chuan Zhao et al [19] designed a magnetic levitation system that uses a zero-power control method, and the results show that the system levitates well and uses constant air gap control to achieve higher safety when changing the levitation mass. Kirill Poletkin [20] investigated the static pull-in of a tilt drive in a hybrid levitation micro-actuator and nonlinear modeling of the calculation of the mutual inductance and the action force between two circular filaments and experimentally verified the accuracy of the developed model, predicting the pull-in parameters of the hybrid levitation actuator with the developed analytical tool. Dongjue HE et al [21] designed a magnetic levitation lens driving actuator, which is applied in laser processing; the actuator drives the lens to achieve real-time positioning of the laser beam focus point with good control performance and positioning accuracy.…”

Magnetic stiffness calculation for the corresponding force between two current-carrying circular filaments arbitrarily oriented in the space

“…Analytical methods applied to the calculation of mutual inductance between two circular filaments and arising magnetic force, magnetic torque and corresponding magnetic stiffness when such the filament system carries electric currents is a prime example. These methods have proved their efficiency and have been successfully employed in an increasing number of applications, including electromagnetic levitation [1,2], superconducting levitation [3], calculation of mutual inductance between thick coils [4], magnetic force and torque calculation between circular coils [5,6,7], wireless power transfer [8,9,10], electromagnetic actuation [11,12,13], micro-machined contactless inductive suspensions [14,15,16] and hybrid contactless suspensions [17,18,19,20], biomedical applications [21,22], topology optimization [23], nuclear magnetic resonance [24,25], indoor positioning systems [26], navigation sensors [27], noncontact gap measurement sensors [28], wireless power transfer systems [29,30], magneto-inductive wireless communications [31] and others.…”