On the use of ZX-LiNbO3 acoustic plate mode devices as detectors for dilute electrolytes

Josse, Fabien; Shana, Z.A.; Haworth, Daniel T.; Liew, Soo Chin; Grunze, M.

doi:10.1016/0925-4005(92)80202-9

Cited by 33 publications

(9 citation statements)

References 20 publications

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“…Fabrication of APM devices requires additional design procedures for the fabrication of the thin plates with respect to the IDT periodicity. For this we can use bulk piezoelectric materials, either quartz [14,15] or LiNbO 3 sliced into thin plates [16]. Most of the SH APM devices are based on this design because of the ability to choose the appropriate crystallographic orientation allowing for the generation of shear waves.…”

Section: Design Techniquesmentioning

confidence: 99%

Acoustic wave sensors: design, sensing mechanisms and applications

Hoummady

Campitelli

Włodarski

1997

Smart Mater. Struct.

142

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Acoustic waves are currently being used in a wide range of sensor fields including physical sensing, chemical sensing and biosensing. Their implementation requires specific knowledge of materials, acoustic wave properties, device design and the sensing mechanisms involved for a wide range of applications. In this paper, the authors report on commonly used acoustic wave devices in sensor applications as well as the design techniques and fabrication processes. Sensing mechanisms and a portable sensor array system are described. The development of IC-based processes, thin-film deposition and sensitive layer fixation will allow for the integration of a total physical and chemical analysis system in the one IC package, leading to the evolution of smart sensors.

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Section: Design Techniquesmentioning

confidence: 99%

Acoustic wave sensors: design, sensing mechanisms and applications

Hoummady

Campitelli

Włodarski

1997

Smart Mater. Struct.

142

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“…The most common electrical property monitored is solution conductivity, which has been monitored using TSMs [89,113,164,176] and SH-APMs [54,58,177]. These conductivity effects can be removed using a grounded conductive metal layer completely covering the piezoelectric substrate in contact with the solution (see Section 4.4.4).…”

Section: Fluid Characterizationmentioning

confidence: 99%

Acoustic Wave Sensors

1996

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“…As a result, the ions in the electrolyte redistribute to form a very thin double layer (Gouy-Chapman layer) at the interface between the substrate and solution. The more the ion concentration increase, the more the double layer blocks the electric field from penetrating the bulk of the solution (Josse et al (1992); Yang et al (1993); Shana et al (1994)).…”

Section: Resultsmentioning

confidence: 99%

Resonance acoustic microbalance with naked-embedded quartz (RAMNE-Q) biosensor fabricated by microelectromechanical-system process

Kato

Ogi

Yanagida

et al. 2012

Biosensors and Bioelectronics

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A resonance acoustic microbalance with a naked-embedded quartz (RAMNE-Q) is realized by a microfabrication method, aiming at broader applications of quartz-crystal microbalance (QCM) biosensors. The RAMNE-Q biosensor consists of three layers; a silicon layer with an engraved microchannel and sandwiching glass layers. The naked AT-cut quartz resonator of 9.3 or 28.5 μm thick is located in the microchannel and supported by the silicon micropillars and semicircular walls without fixing, and it is encapsulated by the rigid body. Cupper antennas are used for generating and receiving electromagnetic fields to excite and detect the shear vibration of the quartz oscillator during the solution flow, thereby achieving the noncontact measurement of the resonance frequency. Because of the isolated resonator, the Q factor is high enough (about 1500 at 170-180 MHz) even in the flowing solution. We succeeded in detecting 1 ng/ml human immunoglobulin G in phosphate-buffered-saline solution via Staphylococcus aureus protein A immobilized nonspecifically on the quartz surfaces, demonstrating the high sensitivity and high signal-to-noise ratio of the RAMNE-Q biosensor. It does not require electrodes and is a replacement-free biosensor, and its reusability is confirmed.

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On the use of ZX-LiNbO3 acoustic plate mode devices as detectors for dilute electrolytes

Cited by 33 publications

References 20 publications

Acoustic wave sensors: design, sensing mechanisms and applications

Acoustic wave sensors: design, sensing mechanisms and applications

Acoustic Wave Sensors

Resonance acoustic microbalance with naked-embedded quartz (RAMNE-Q) biosensor fabricated by microelectromechanical-system process

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