2019
DOI: 10.1088/1361-6595/ab1dfb
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On the validity of neutral gas temperature by emission spectroscopy in micro-discharges close to atmospheric pressure

Abstract: The neutral gas temperature (Tg) of a single micro-hollow cathode discharge (MHCD) elaborated on silicon wafer is investigated. The MHCD is continuously powered in DC yielding a plasma in He, Ar and N 2 gases close to atmospheric pressure. Values of Tg determined by means of optical emission spectroscopy inside and in the vicinity of a single cavity of 100 µm diameter. In this work, the use of the resonant broadening to infer Tg is thoroughly reconsidered taking into account the reevaluation of an empirical co… Show more

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Cited by 9 publications
(10 citation statements)
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“…2). 54 The relative intensity of each ro-vibrational transition is calculated according to,with v ′, J ′ and v ′′, J ′′ the upper and lower vibrational, rotational excited states respectively. N n ′ is the number density of N 2 (C 3 Π u → B 3 Π g ) in the excited state n ′, q v ′, v ′′ is the so-called Franck–Condon factor and S J ′, J ′′ the Hönl–London factor – or line strength of the rotational state–.…”
Section: Methodsmentioning
confidence: 99%
“…2). 54 The relative intensity of each ro-vibrational transition is calculated according to,with v ′, J ′ and v ′′, J ′′ the upper and lower vibrational, rotational excited states respectively. N n ′ is the number density of N 2 (C 3 Π u → B 3 Π g ) in the excited state n ′, q v ′, v ′′ is the so-called Franck–Condon factor and S J ′, J ′′ the Hönl–London factor – or line strength of the rotational state–.…”
Section: Methodsmentioning
confidence: 99%
“…In this study, the plasma source is operated at atmospheric pressure. The gas temperature is estimated to be 360 K obtained in a similar device by analysing the line width of a resonance broadened helium transition including a Van der Waals contribution [31]. This yields to a FWHM of f L ≈ 0.10 nm being a factor of about 100 larger than the negligible Doppler broadening.…”
Section: Line Broadeningmentioning
confidence: 99%
“…The spectral resolution of the system is (25 ± 1) pm at the band head (380.5 nm) of the N 2 (C-B)(0-2) vibrational band. The analysis of the rotational spectra is performed with a numerical tool developed in a previous study 28 . The parameters of the simulated spectrum are optimized with a non-linear leastsquare minimization algorithm to fit the experimental data.…”
Section: Experimental Setup and Methodsmentioning
confidence: 99%