On the wet etching of Pyrex glass

Iliescu, Ciprian; Chen, Bangtao; Miao, Jianmin

doi:10.1016/j.sna.2007.11.022

Cited by 142 publications

(78 citation statements)

References 27 publications

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“…Glass is a mixture of oxides whose composition affects etching behavior. 45 It is preferable to use glass with a low content of any oxides that give insoluble products after reaction with HF. Such oxides include CaO, MgO, and Al 2 O 3 .…”

Section: Wet Etchingmentioning

confidence: 99%

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A practical guide for the fabrication of microfluidic devices using glass and silicon

Iliescu¹,

Taylor²,

Avram³

et al. 2012

Biomicrofluidics

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311

207

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This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow. I. WHY USE SILICON AND GLASS IN MICRO-AND NANO-FLUIDIC APPLICATIONS?Micro-and nano-fluidic technology continues to be embraced by biologists, 1-3 chemists, 4 and engineers throughout academia and industry. As its applications have expanded, there has been an explosion in the range of materials and processes used to fabricate these devices. The earliest microfluidic devices (e.g., gas 5 and liquid 6 chromatography devices) were made from silicon and glass and borrowed processes directly from semiconductor and microelectromechanical systems (MEMS) manufacturing. 7 Now, however, many researchers have moved away from silicon and glass, and instead use cast elastomers such as polydimethylsiloxane (PDMS)-which is ideal for swift prototyping-or thermoplastic polymers, which can be hot-embossed or injection-molded and are well suited to inexpensive manufacturing. Yet, there remain many applications where glass and silicon offer advantages over polymeric materials. In this paper, we highlight these advantages and offer a framework for selecting fabrication processes when using silicon and glass. A. The dominance of soft lithographyOver the last decade, PDMS has become virtually the default material for forming microfluidic devices, 8 because of the sheer ease with which it can be cast on to a micro-scale mould and then strongly bonded to glass. 9 The elastomeric nature of the material has been exploited to integrate fluidic valves and pumps on-chip and has simplified the production of multi-layer devices because the soft layers readily conform to each other. 10,11 Yet, the low stiffness (usually <1 MPa) of PDMS relative to amorphous thermoplastics, silicon, and glass has its own a) Authors to whom correspondence should be addressed. Electronic addresses: ciliescu@ibn.a-star.edu.sg and hkt@ntu.edu.sg. 6, 016505 (2012) drawbacks. High aspect-ratio channels are notoriously difficult to fabricate in PDMS because of their propensity to collapse. 12 Moreover, difficulties in automating the handling of such a soft material have hampered efforts to scale up PDMS device manufacturing. Meanwhile, PDMS's high oxygen and water permeabilities have proved both a blessing and a curse in different applications.The hydrophobic nature of PDMS can be an important consideration for some biological applications. In drug screening applications, for example, hydrophobic drugs as well as metabolites (urea or albumin) can be absorbed into the device's material due to hydrophobic--hydrophobic interaction...

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Section: Wet Etchingmentioning

confidence: 99%

“…63 A detailed analysis of masking materials used in wet etching of glass is presented in Ref. 45. The use of a photoresist mask is limited to shallow etching (up to a 2-min etching process in 49% HF).…”

Section: Wet Etchingmentioning

confidence: 99%

A practical guide for the fabrication of microfluidic devices using glass and silicon

Iliescu¹,

Taylor²,

Avram³

et al. 2012

Biomicrofluidics

Self Cite

311

207

View full text Add to dashboard Cite

show abstract

“…유리는 취성재료로서 크랙 전파가 임의의 방향으로 진행되어 유 리의 절단기술은 매우 흥미로운 주제다 [1] . 이 유리절단 방법에는 다이아몬드툴 같은 공구를 사용하는 기계적인 방법 [4][5][6] , 워터젯을 이용한 방법 [7,8] , 화학 에칭방법 [9,10] 그리고 레이저를 이용한 레이 저 절단방법 등이 있다 [11][12][13][14][15][16][17][18][19] . 현재 상용화된 방법은 기계적 절단 방법으로 절단날을 사용하는 연삭절단 방법과 다이아몬드 스크라 이빙 휠을 이용한 굽힘절단 방법이 있다 [20] .…”

Section: 서 론unclassified

The Fracture Effect of a Non-Symmetric Laser Beam on Glass Cutting

Yoon¹,

Kim²

2015

Journal of The Korean Society of Manufacturing Technology Engin

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Article history:A non-symmetric laser beam was used for cutting a thin glass substrate and its effect was investigated. In laser cutting of brittle materials, controlling crack initiation on the surface is crucial; however, it is difficult to ensure that crack propagation occurs according to a designed laser path. A lot of deviation in crack propagation, especially at the edge of the substrate, is usually observed. A non-symmetric laser beam generates a non-uniform energy distribution, which enhances directional crack propagation. A 20-W pulsed YAG laser was used for cutting a thin glass substrate. Parametric analysis was carried out and the crack control of the non-symmetric laser beam was improved. A theoretical model was presented and the limitations of the proposed process were also discussed. . 이 유리절단 방법에는 다이아몬드툴 같은 공구를 사용하는 기계적인 방법 [4][5][6] , 워터젯을 이용한 방법 [7,8] , 화학 에칭방법 [9,10] 그리고 레이저를 이용한 레이 저 절단방법 등이 있다 [11][12][13][14][15][16][17][18][19] . 현재 상용화된 방법은 기계적 절단 방법으로 절단날을 사용하는 연삭절단 방법과 다이아몬드 스크라 이빙 휠을 이용한 굽힘절단 방법이 있다 [20] . 그러나 이런 기계적인 절단 방식은 절단 시 유리에 발생한 마이크로 크랙이 미세한 손상을 초래하며, 이 손상은 마이크로 입자 를 발생시킨다 [20][21][22] . [20,[22][23][24] .

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“…Alternativas como uso de fotoresiste espesso, carbeto de silício, cobre e silício-poli também são citados. Para corrosões por plasma, o uso de Níquel é o mais conhecido [23,24,25,26] .…”

Section: Obtenção Dos Microcanaisunclassified

“…A terceira etapa envolve a corrosão do vidro, que pode ser por via seca [27] ou úmida [23,24,25] . A corrosão seca envolve o uso de plasmas, tendo como base fenômenos físico-químico, como colisões de íons reativos com moléculas dos gases utilizados que interagem então com a superfície do vidro.…”

Section: Obtenção Dos Microcanaisunclassified

Sistemas microfluídicos aplicados na produção de micro e nanopartículas.

Schianti¹

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On the wet etching of Pyrex glass

Cited by 142 publications

References 27 publications

A practical guide for the fabrication of microfluidic devices using glass and silicon

A practical guide for the fabrication of microfluidic devices using glass and silicon

The Fracture Effect of a Non-Symmetric Laser Beam on Glass Cutting

Sistemas microfluídicos aplicados na produção de micro e nanopartículas.

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